Semiconductor structure and process thereof
A semiconductor structure includes a metal gate, a second dielectric layer and a contact plug. The metal gate is located on a substrate and in a first dielectric layer, wherein the metal gate includes a work function metal layer having a U-shaped cross-sectional profile and a low resistivity material located on the work function metal layer. The second dielectric layer is located on the metal gate and the first dielectric layer. The contact plug is located on the second dielectric layer and in a third dielectric layer, thereby a capacitor is formed. Moreover, the present invention also provides a semiconductor process forming said semiconductor structure.
1. A semiconductor structure, comprising:
a metal gate located on a substrate and in a first dielectric layer, wherein the metal gate has a work function metal layer having a U-shaped cross-sectional profile and a low resistivity material located on the work function metal layer having a U-shaped cross-sectional profile;
a second dielectric layer located on the metal gate and the first dielectric layer; and
a contact plug located on the second dielectric layer and in a third dielectric layer, thereby forming a capacitor with the second dielectric layer sandwiched by the metal gate and the contact plug.
2. The semiconductor structure according to claim 1 , further comprising:
an isolation structure located in the substrate and directly below the metal gate.
3. The semiconductor structure according to claim 1 , wherein the metal gate further comprises a U-shaped cross-sectional profile dielectric layer having a high dielectric constant located below the work function metal layer having a U-shaped cross-sectional profile.
4. The semiconductor structure according to claim 1 , wherein the metal gate further comprises a “ ”-shaped cross-sectional profile dielectric layer having a high dielectric constant located between the work function metal layer having a U-shaped cross-sectional profile and the substrate.
5. The semiconductor structure according to claim 1 , wherein the work function metal layer having a U-shaped cross-sectional profile comprises a titanium nitride layer, an aluminum titanium layer, or a titanium carbide.
6. The semiconductor structure according to claim 1 , wherein the low resistivity material comprises tungsten or aluminum.
7. The semiconductor structure according to claim 1 , wherein the second dielectric layer comprises a nitride layer, an oxynitride layer, a carbon-containing silicon nitride layer or an oxide layer.
8. The semiconductor structure according to claim 1 , wherein the second dielectric layer is a single layer or a multilayer.
9. The semiconductor structure according to claim 1 , wherein the second dielectric layer comprises stacked two material layers having different etching rates for an etching process.
10. The semiconductor structure according to claim 1 , wherein a part of a top surface of the second dielectric layer contacting the contact plug is lower than the other part of the top surface of the second dielectric layer beside the contact plug.
11. The semiconductor structure according to claim 1 , further comprising:
a MOS transistor comprising a first metal gate, and the first metal gate is in the same level as the metal gate.
12. The semiconductor structure according to claim 11 , further comprising:
a plurality of first contact plugs located in the second dielectric layer and the first dielectric layer, and physically connecting a source/drain of the MOS transistor.
13. The semiconductor structure according to claim 11 , further comprising:
a plurality of second contact plugs located in the third dielectric layer, and physically connecting the metal gate and the MOS transistor.