Thin film electrode ceramic substrate and method for manufacturing the same
Disclosed herein are a thin film electrode ceramic substrate and a method for manufacturing the same. The thin film electrode ceramic substrate includes: a ceramic substrate; one or more anti-etching metal layers formed in a surface of the ceramic substrate; thin film electrode pattern formed on the anti-etching metal layers; and a plating layer formed on the thin film electrode pattern, wherein respective edge portions of the thin film electrode pattern are contacted with the anti-etching metal layer, and thus, an undercut defect occurring between the surface of the ceramic substrate and the thin film electrode pattern and between the thin film electrode patterns due to an etchant can be prevented and the binding strength of the entire thin film electrode pattern can be enhanced, resulting in securing durability and reliability of the thin film electrode patterns.
1. A thin film electrode ceramic substrate, comprising:
a ceramic substrate;
a plurality of anti-etching metal layers formed in a surface of the ceramic substrate;
a thin film electrode pattern formed on the anti-etching metal layers; and
a plating layer formed on the thin film electrode pattern,
wherein the anti-etching metal layers are extant under respective edge portions of the thin film electrode pattern and extends, in the ceramic substrate, a distance away from the thin film electrode pattern,
the edge portions of the thin film electrode pattern are contacted with the respective anti-etching metal layers,
the anti-etching metal layers are spaced apart from each other by a predetermined distance, except in a region where the anti-etching metal layers are contacted with the respective edge portions of the thin film electrode pattern, and
the ceramic substrate underlays entire bottom surfaces of the anti-etching metal layers.
2. The thin film electrode ceramic substrate according to claim 1 , wherein the anti-etching metal layers are formed in the surface of the ceramic substrate in an intaglio type.
3. The thin film electrode ceramic substrate according to claim 1 , wherein the anti-etching metal layers are formed at the same height as the surface of the ceramic substrate.
4. The thin film electrode ceramic substrate according to claim 1 , wherein the anti-etching metal layers are formed of at least one material selected from the group consisting of silver (Ag), copper (Cu), nickel (Ni), and gold (Au).
5. The thin film electrode ceramic substrate according to claim 1 , wherein the plating layer is formed in at least one layer.
6. The thin film electrode ceramic substrate according to claim 5 , wherein the plating layer is constituted by sequentially forming a copper (Cu) layer/a nickel (Ni) layer/a gold (Au) layer.