Memory array plane select and methods
Memory arrays and methods of forming the same are provided. An example memory array can include at least one plane having a plurality of memory cells arranged in a matrix and a plurality of plane selection devices. Groups of the plurality of memory cells are communicatively coupled to a respective one of a plurality of plane selection devices. A decode logic having elements is formed in a substrate material and communicatively coupled to the plurality of plane selection devices. The plurality of memory cells and the plurality of plane selection devices are not formed in the substrate material.
1. A memory array, comprising:
a plurality of planes each having a plurality of memory cells arranged in a matrix and a plurality of plane selection devices, groups of the plurality of memory cells being communicatively coupled to a respective one of a plurality of plane selection devices, wherein a first plane is associated with a first number of access lines and a second plane is associated with a second number of access lines; and
a decode logic having elements formed in a substrate material and communicatively coupled to the plurality of plane selection devices,
wherein the first number of access lines and the second number of access lines are respectively coupled in parallel to a number of common access lines that are communicatively coupled to the decode logic, and
wherein the plurality of memory cells and the plurality of plane selection devices are not formed in the substrate material.
2. The memory array of claim 1 , wherein each of the plurality of memory cells is communicatively coupled to a respective pair of the plurality of plane selection devices.
3. The memory array of claim 1 , wherein elements of the decode logic include transistors formed in a silicon substrate material, and the plurality of plane selection devices are thin film devices.
4. The memory array of claim 1 , wherein each of the plurality of plane select devices are an ovonic threshold switch (OTS).
5. The memory array of claim 4 , wherein each of the plurality of plane select devices is a three-terminal OTS.
6. The memory array of claim 5 , wherein a first terminal of the three-terminal OTS is communicatively coupled in parallel to a group of the plurality of memory cells, a second terminal of the three-terminal OTS is communicatively coupled to the decode logic, and a third terminal of the three-terminal OTS is communicatively coupled to a plane enable control line.
7. The memory array of claim 6 , wherein the three-terminal OTS is communicatively coupled to the plane enable control line in a common base configuration.
8. The memory array of claim 6 , wherein the three-terminal OTS is communicatively coupled to the plane enable control line in a common collector configuration.
9. The memory array of claim 1 , wherein each memory cell includes a storage device and a thin film cell select device.
10. The memory array of claim 9 , wherein each memory cell is a phase change material and switch (PCMS) device.
11. The memory array of claim 10 , wherein the cell select device is a two-terminal OTS formed in series with the phase change material.
12. A method of forming a memory array, comprising:
forming decode circuitry in a substrate material;
forming at least one plane having phase change material and switch (PCMS) memory cells arranged in a matrix and a plane select device,
wherein a group of the PCMS memory cells are communicatively coupled to a conductive line, and the conductive line is communicatively coupled to the decode circuitry directly from the plane select device.
13. The method of claim 12 , wherein forming the plane select device includes forming a three-terminal ovonic threshold switch (OTS) in a common base configuration, the common base connected to a respective plane enable signal.
14. The method of claim 12 , wherein forming the plane select device includes forming a three-terminal ovonic threshold switch (OTS) in a common collector configuration, the common base connected to a respective plane enable signal.