Dense oxide coated component of a plasma processing chamber and method of manufacture thereof
A method of forming a dense oxide coating on an aluminum component of semiconductor processing equipment comprises cold spraying a layer of pure aluminum on a surface of the aluminum component to a predetermined thickness. A dense oxide coating is then formed on the layer of pure aluminum using a plasma electrolytic oxidation process, wherein the plasma electrolytic oxidation process causes the layer of pure aluminum to undergo microplasmic discharges, thus forming the dense oxide coating on the layer of pure aluminum on the surface of the aluminum component.
1. An aluminum component of semiconductor processing equipment comprising:
a pure aluminum layer on a surface of the aluminum component of the semiconductor processing equipment; and
a dense oxide coating on the pure aluminum layer wherein the dense oxide coating has been formed using plasma electrolytic oxidation, and wherein the plasma electrolytic oxidation causes the pure aluminum layer to undergo microplasmic discharge forming the dense oxide coating on the aluminum component;
wherein the pure aluminum layer has a thickness of about 0.05 to 3 mm and the dense oxide coating has a thickness between about 0.02 to 0.2 mm.
2. The aluminum component of claim 1 , further comprising a pure yttrium oxide barrier layer on the dense oxide coating wherein the pure yttrium oxide barrier layer has a purity of at least 99%.
3. The aluminum component of claim 1 , wherein the aluminum component is at least one of a chamber wall, chamber liner, baffle, gas distribution plate, gas distribution ring, chucking mechanism, edge ring, gas nozzle, fastener, shroud, and confinement ring.
4. The aluminum component of claim 1 , wherein (a) the pure aluminum layer has a porosity of less than about 1%; and (b) the dense oxide coating has a porosity of less than about 0.5%.
5. The aluminum component of claim 1 , wherein (a) the pure aluminum layer has a porosity of less than about 0.5%; and (b) the dense oxide coating has a porosity of less than about 0.2%.
6. The aluminum component of claim 1 , wherein the pure aluminum layer has a thickness of about 0.1 to 0.3 mm.
7. The aluminum component of claim 1 , wherein the pure aluminum layer is a pure aluminum layer having by weight at least 99.9% purity and at most 0.1% incidental impurities.
8. The aluminum component of claim 1 , wherein the dense oxide coating has a surface roughness of about 2 to 20 microns.
9. An aluminum component of semiconductor processing equipment comprising:
a pure aluminum layer on a surface of the aluminum component which is configured to be exposed to plasma or process gas during processing of a semiconductor substrate in the semiconductor processing equipment; and
a dense oxide coating on the pure aluminum layer wherein the dense oxide coating has been formed using plasma electrolytic oxidation, and wherein the plasma electrolytic oxidation causes the pure aluminum layer to undergo microplasmic discharge forming the dense oxide coating on the aluminum component; wherein the pure aluminum layer is a pure aluminum layer having by weight at least 99.9% purity and at most 0.1% incidental impurities.
10. The aluminum component of claim 9 , wherein (a) the pure aluminum layer has a thickness of about 0.05 to 3 mm; and (b) the dense oxide coating has a thickness between about 0.02 to 0.2 mm.
11. The aluminum component of claim 9 , further comprising a pure yttrium oxide barrier layer on the dense oxide coating wherein the pure yttrium oxide barrier layer has a purity of at least 99%.
12. The aluminum component of claim 9 , wherein the dense oxide coating has a surface roughness of about 2 to 20 microns.