Gate electrode with stabilized metal semiconductor alloy-semiconductor stack
A gate structure is provided on a channel portion of a semiconductor substrate. The gate structure may include an electrically conducting layer present on a gate dielectric layer, a semiconductor-containing layer present on the electrically conducting layer, a metal semiconductor alloy layer present on the semiconductor-containing layer, and a dielectric capping layer overlaying the metal semiconductor alloy layer. In some embodiments, carbon and/or nitrogen can be present within the semiconductor-containing layer, the metal semiconductor alloy layer or both the semiconductor-containing layer and the metal semiconductor alloy layer. The presence of carbon and/or nitrogen within the semiconductor-containing layer and/or the metal semiconductor alloy layer provides stability to the gate structure. In another embodiment, a layer of carbon and/or nitrogen can be formed between the semiconductor-containing layer and the metal semiconductor alloy layer.
1. A semiconductor device comprising:
a gate structure present on a channel portion of a semiconductor substrate, wherein the gate structure comprises:
a gate dielectric layer overlaying said channel portion of the semiconductor substrate,
an electrically conducting layer present directly on a topmost surface of the gate dielectric layer, said electrically conducing layer comprises at least one metal that provides a threshold voltage shift to said gate structure,
a semiconductor-containing layer present on the electrically conducting layer,
a metal semiconductor alloy layer present on the semiconductor-containing layer, and
a dielectric capping layer overlaying the metal semiconductor alloy layer,
wherein said metal semiconductor alloy layer is doped with at least one of carbon and nitrogen; and
at least one gate sidewall spacer located adjacent the gate structure and on a surface of the semiconductor substrate, wherein the at least one gate sidewall spacer and the dielectric capping layer encapsulate the metal semiconductor alloy layer within the gate structure.
2. The semiconductor device of claim 1 , wherein an entirety of said metal semiconductor alloy layer is doped with at least one of carbon and nitrogen.
3. The semiconductor device of claim 1 , wherein a portion of said metal semiconductor alloy layer is doped with at least one of carbon and nitrogen, and another portion of the metal semiconductor alloy layer is non-doped.
4. The semiconductor device of claim 3 , wherein said portion of said metal semiconductor alloy layer doped with at least one of carbon and nitrogen has a bottom surface in direct contact with an upper surface of said semiconductor-containing layer.
5. The semiconductor device of claim 1 , wherein said semiconductor-containing layer is also doped with at least one of carbon and nitrogen.
6. The semiconductor device of claim 5 , wherein an entirety of each of said semiconductor-containing layer and metal semiconductor alloy layer is doped with at least one of carbon and nitrogen.
7. The semiconductor device of claim 5 , wherein a portion of said semiconductor-containing layer is doped with at least one of carbon and nitrogen, another portion of the semiconductor-containing alloy is non-doped, a portion of said metal semiconductor alloy layer is doped with at least one of carbon and nitrogen, and another portion of said metal semiconductor alloy layer is non-doped.
8. The semiconductor device of claim 7 , wherein said portion of said semiconductor-containing layer doped with at least one of carbon and nitrogen is in direct contact with said portion of said metal semiconductor alloy doped with at least one of carbon and nitrogen.
9. The semiconductor device of claim 1 , wherein said semiconductor-containing layer is amorphous or polycrystalline.
10. The semiconductor device of claim 1 , wherein said at least one of carbon and nitrogen is present in an amount from 0.01 to 10 atomic percent.
11. A semiconductor device comprising:
a gate structure present on a channel portion of a semiconductor substrate, wherein the gate structure comprises:
a gate dielectric layer overlaying said channel portion of the semiconductor substrate,
an electrically conducting layer present on the gate dielectric layer,
a semiconductor-containing layer present on the electrically conducting layer,
a metal semiconductor alloy layer that is doped with at least one of carbon and nitrogen and present on the semiconductor-containing layer, and
a dielectric capping layer overlaying the metal semiconductor alloy layer, and
at least one gate sidewall spacer located adjacent the gate structure and on a surface of the semiconductor substrate, wherein the at least one gate sidewall spacer and the dielectric capping layer encapsulate the metal semiconductor alloy layer within the gate structure.
12. A semiconductor device comprising:
a gate structure present on a channel portion of a semiconductor substrate, wherein the gate structure comprises:
a gate dielectric layer overlaying said channel portion of the semiconductor substrate,
an electrically conducting layer present on the gate dielectric layer,
a semiconductor-containing layer present on the electrically conducting layer,
a metal semiconductor alloy layer present on the semiconductor-containing layer, and
a dielectric capping layer overlaying the metal semiconductor alloy layer, wherein each of said semiconductor-containing layer and said metal semiconductor alloy layer is doped with at least one of carbon and nitrogen, and wherein a portion of said semiconductor-containing layer is doped with at least one of carbon and nitrogen, another portion of the semiconductor-containing alloy is non-doped, a portion of said metal semiconductor alloy layer is doped with at least one of carbon and nitrogen, and another portion of said metal semiconductor alloy layer is non-doped; and
at least one gate sidewall spacer located adjacent the gate structure and on a surface of the semiconductor substrate, wherein the at least one gate sidewall spacer and the dielectric capping layer encapsulate the metal semiconductor alloy layer within the gate structure.
13. A semiconductor device comprising:
a gate structure present on a channel portion of a semiconductor substrate, wherein the gate structure comprises:
a gate dielectric layer overlaying said channel portion of the semiconductor substrate,
an electrically conducting layer present directly on a topmost surface of the gate dielectric layer, said electrically conducing layer comprises at least one metal that provides a threshold voltage shift to said gate structure,
a semiconductor-containing layer present on the electrically conducting layer,
a metal semiconductor alloy layer present on the semiconductor-containing layer, and
a dielectric capping layer overlaying the metal semiconductor alloy layer,
wherein a portion of said semiconductor-containing layer is doped with at least one of carbon and nitrogen, another portion of the semiconductor-containing alloy is non-doped, a portion of said metal semiconductor alloy layer is doped with at least one of carbon and nitrogen, and another portion of said metal semiconductor alloy layer is non-doped; and
at least one gate sidewall spacer located adjacent the gate structure and on a surface of the semiconductor substrate, wherein the at least one gate sidewall spacer and the dielectric capping layer encapsulate the metal semiconductor alloy layer within the gate structure.