Semiconductor chip and semiconductor package having the same
A semiconductor chip includes a semiconductor substrate having one surface, the other surface which faces away from the one surface, and an integrated circuit which is formed on the one surface; and a shielding layershielding layer formed in the semiconductor substrate to correspond to the other surface.
1. A semiconductor chip comprising:
a semiconductor substrate having one surface, an other surface which faces away from the one surface, and an integrated circuit which is formed on the one surface;
a shielding layer formed in the semiconductor substrate to correspond to the other surface; and
a dielectric layer formed between the shielding layer and first through electrodes,
the first through electrodes passing through the semiconductor substrate and the shielding layer and the integrated circuit and electrically connected with the integrated circuit through bonding pads, wherein the dielectric layer electrically isolates the first through electrodes from the shielding layer,
wherein the shielding layer is disposed to be separated from the other surface of the semiconductor substrate by a predetermined distance, and
wherein the shielding layer comprises a nonmetal, ion-doped portion of the semiconductor substrate,
wherein the shielding layer is formed by nonmetal ions implanted into the semiconductor substrate.
2. The semiconductor chip according to claim 1 , further comprising:
the first through electrodes passing through the semiconductor substrate and the shielding layer and electrically connected with the integrated circuit.
3. The semiconductor chip according to claim 2 ,
wherein the semiconductor substrate is divided into a core region where the integrated circuit is disposed and a peripheral region which is defined outside the core region, and
wherein the first through electrodes are formed in the core region.
4. The semiconductor chip according to claim 2 , further comprising:
a dielectric layer electrically isolating the first through electrodes and the shielding layer from each other.
5. The semiconductor chip according to claim 1 , further comprising:
a second through electrode passing through the semiconductor substrate and the shielding layer and electrically connected with the shielding layer.
6. The semiconductor chip according to claim 5 ,
wherein the semiconductor substrate is divided into a core region where the integrated circuit is disposed and a peripheral region which is defined outside the core region, and
wherein the second through electrodes are formed in the peripheral region.
7. The semiconductor chip according to claim 6 , wherein the second through electrodes are formed in a plural number along edges of the core region.
8. The semiconductor chip according to claim 1 , further comprising:
an additional shielding layer formed on side surfaces of the semiconductor substrate and electrically connected with the shielding layer.
9. The semiconductor chip according to claim 8 , further comprising:
a dielectric layer formed between the additional shielding layer and the side surfaces of the semiconductor substrate.
10. The semiconductor chip according to claim 1 , wherein the semiconductor substrate further has grooves which are defined on side surfaces of the semiconductor substrate, connect the one surface and the other surface with each other and expose the shielding layer.
11. The semiconductor chip according to claim 10 , further comprising:
an additional shielding layer formed in the grooves and electrically connected with the shielding layer.
12. A semiconductor package including a semiconductor chip, the semiconductor chip comprising:
a semiconductor substrate having one surface, an other surface which faces away from the one surface, and an integrated circuit which is formed on the one surface;
a shielding layer formed in the semiconductor substrate to correspond to the other surface; and
a dielectric layer formed between the shielding layer and first through electrodes,
the first through electrodes passing through the semiconductor substrate and the shielding layer and the integrated circuit and electrically connected with the integrated circuit through bonding pads, wherein the dielectric layer electrically isolates the first through electrodes from the shielding layer,
wherein the shielding layer is disposed to be separated from the other surface of the semiconductor substrate by a predetermined distance, and
wherein the shielding layer comprises a nonmetal, ion-doped portion of the semiconductor substrate,
wherein the shielding layer is formed by nonmetal ions implanted into the semiconductor substrate.
13. The semiconductor package according to claim 12 , wherein the semiconductor chip further comprises:
the first through electrodes passing through the semiconductor substrate and the shielding layer and electrically connected with the integrated circuit; and
second through electrodes passing through the semiconductor substrate and the shielding layer and electrically connected with the shielding layer.
14. The semiconductor package according to claim 13 , further comprising:
a structural body having connection electrodes which are electrically connected with the first through electrodes and ground electrodes which are electrically connected with the second through electrodes.
15. The semiconductor package according to claim 14 , wherein the semiconductor chip is disposed such that the other surface of the semiconductor substrate faces the structural body and the one surface of the semiconductor substrate faces away from the structural body.
16. The semiconductor package according to claim 14 , wherein the semiconductor chip is disposed such that the one surface of the semiconductor substrate faces the structural body and the other surface of the semiconductor substrate faces away from the structural body.
17. The semiconductor package according to claim 13 , wherein a plurality of semiconductor chips are stacked by the medium of first and second through electrodes.
18. The semiconductor package according to claim 17 , further comprising:
a structural body having connection electrodes which are electrically connected with the first through electrodes of a lowermost semiconductor chip among the stacked semiconductor chips and ground electrodes which are electrically connected with the second through electrodes of the lowermost semiconductor chip.
19. The semiconductor package according to claim 18 , wherein the stacked semiconductor chips are disposed such that the other surface of each semiconductor substrate faces the structural body and the one surface of each semiconductor substrate faces away from the structural body.
20. The semiconductor package according to claim 18 , wherein the stacked semiconductor chips are disposed such that the one surface of each semiconductor substrate faces the structural body and the other surface of each semiconductor substrate faces away from the structural body.
21. The semiconductor package according to claim 18 , wherein a lowermost semiconductor chip of the stacked semiconductor chips is disposed such that the other surface of the semiconductor substrate faces the structural body and the one surface of the semiconductor substrate faces away from the structural body, and an uppermost semiconductor chip of the stacked semiconductor chips is disposed such that the one surface of the semiconductor substrate faces the structural body and the other surface of the semiconductor substrate faces away from the structural body.