Endpoint detection during polishing using integrated differential intensity

1. A method of controlling a polishing operation, comprising:

polishing a substrate;

during polishing, obtaining a sequence over time of measured spectra from the substrate with an in-situ optical monitoring system;

for each measured spectrum from the sequence of measured spectra, determining a difference between the measured spectrum and an immediate previous spectrum from the sequence;

accumulating the difference for each measured spectrum to generate a total difference;

comparing the total difference to a threshold; and

detecting a polishing endpoint based on the comparison of the total difference to the threshold.

2. The method of claim 1 , wherein obtaining the sequence comprises scanning a sensor of the optical monitoring system across the substrate.

3. The method of claim 2 , wherein obtaining the sequence comprises generating one measured spectrum per scan of the sensor across the substrate.

4. The method of claim 3 , wherein polishing the substrate comprises rotating a platen that supports the sensor, and one measured spectrum is generated per rotation of the platen.

5. The method of claim 3 , wherein the in-situ monitoring system generates a plurality of raw spectra per scan of the sensor across the substrate.

6. The method of claim 5 , wherein generating the one measured spectrum per scan comprises combining at least some of the plurality of raw spectra.

7. The method of claim 6 , wherein combining at least some of the plurality of raw spectra comprises averaging the at least some of the plurality of raw spectra.

8. The method of claim 5 , wherein generating the one measured spectrum per scan comprises selecting a raw spectrum from at least some of the plurality of raw spectra.

9. The method of claim 1 , wherein determining the difference comprises calculating a sum of squared differences between the measured spectrum and the immediate previous spectrum.

10. The method of claim 1 , wherein determining the difference comprises calculating a sum of absolute differences between the measured spectrum and the immediate previous spectrum.

11. The method of claim 1 , wherein obtaining the sequence of measured spectra comprises directing a beam of light onto the substrate and measuring a spectrum of a reflection of the beam.

12. The method of claim 1 , wherein accumulating the difference comprising summing the difference.

13. The method of claim 1 , wherein detecting the polishing endpoint comprises halting polishing if the total difference exceeds the threshold.

14. The method of claim 1 , wherein the total difference is calculated for each measured spectrum to generate a sequence of total differences, and wherein detecting the polishing endpoint includes fitting a function to the sequence of total differences and determining a time at which the function equals the threshold.

15. A method of controlling a polishing operation, comprising:

polishing a substrate;

during polishing, for each zone of a plurality of zones on a substrate, obtaining a sequence over time of measured spectra from the substrate with an in-situ optical monitoring system;

for each measured spectrum from the sequence of measured spectra for each zone, determining a difference between the measured spectrum and an immediate previous spectrum from the sequence;

for each measured spectrum from the sequence of measured spectra for each zone, accumulating the difference to generate a sequence of total differences;

for each zone fitting a function to the sequence of total differences for the zone to generate a plurality of functions; and

adjusting a polishing parameter based on the plurality of functions to provide more uniform polishing.