IP Library › Granted Patent US 9,287,233
Granted Patent B2
US 9,287,233 · App. 14/093,856 · Granted Mar 15, 2016

Adhesive pattern for advance package reliability improvement

Inventors: Chin-Liang Chen (Kaohsiung, TW); Wei-Ting Lin (Taipei, TW); Kuan-Lin Ho (Hsinchu, TW); Yu-Chih Liu (Taipei, TW); Chun-Cheng Lin (New Taipei, TW); Shih-Yen Lin (New Taipei, TW)
Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
H01L24/81H01L23/10H01L23/42H01L24/17H01L23/3675H01L23/562
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Quick Facts
Patent No.
US 9,287,233
App. No.
14/093,856
Granted
Mar 15, 2016
Kind
B2
Abstract

The present disclosure relates to an integrated chip package having a plurality of different adhesive layers that provide for a low lid induced stress good warpage control of a substrate and/or IC die, and an associated method of formation. The integrated chip package has an integrated chip (IC) die coupled to an underlying substrate by an electrically conductive interconnect structure. A first adhesive layer, having a first Young's modulus, is disposed onto the substrate at a first plurality of positions surrounding the IC die. A second adhesive layer, having a second Young's modulus different than the first Young's modulus, is disposed onto the substrate at a second plurality of positions surrounding the IC die. A lid is affixed to the substrate by the first and second adhesive layers and extends to a position overlying the IC die.

Claims (42)

1. An integrated chip (IC) package, comprising:

an integrated chip (IC) die coupled to an underlying substrate by a plurality of electrically conductive bonding structures;

a first adhesive layer having a first Young's modulus and disposed onto the substrate at a first plurality of positions surrounding the IC die;

a second adhesive layer, having a second Young's modulus less than the first Young's modulus, disposed onto the substrate at a second plurality of positions surrounding the IC die, wherein the second adhesive layer has an “L ” shape comprising two connected orthogonal legs separated from the first adhesive layer by spaces having different sizes; and

a lid affixed to the substrate by the first and second adhesive layers and configured to extend to a position overlying the IC die.

2. The IC package of claim 1 ,

wherein the first adhesive layer is disposed onto the substrate at the first plurality of positions, which are respectively located between a side of the substrate and a proximate side of the IC die; and

wherein the second adhesive layer is disposed onto the substrate at the second plurality of positions, which are respectively located between a corner of the substrate and a proximate corner of the IC die.

3. The IC package of claim 1 , further comprising:

a thermal interface material (TIM) layer vertically disposed between the IC die and the lid.

4. The IC package of claim 3 , wherein the TIM layer, the first adhesive layer, and the second adhesive layer comprise different materials.

5. The IC package of claim 1 , wherein the first adhesive layer is disposed onto the substrate in one or more linear patterns that are interspersed between the second adhesive layer.

6. The IC package of claim 1 , wherein the first Young's modulus is approximately three orders of magnitude larger than the second Young's modulus.

7. The IC package of claim 1 ,

wherein the first Young's modulus is in a range of between approximately 5 GPa (gigapascal) and approximately 10 GPa; and

wherein the second Young's modulus is in a range of between approximately 1 MPa (megapascal) and approximately 8 MPa.

8. The IC package of claim 1 , wherein the first adhesive layer is separated from the second adhesive layer by spaces that form openings in the IC package located between the lid and the substrate.

9. The IC package of claim 1 , further comprising

a plurality of solder balls disposed within an underfill layer located between the IC die and the substrate and configured to prevent CTE mismatch between the IC die and the substrate.

10. An integrated chip (IC) package, comprising:

an integrated chip (IC) die coupled to a substrate by a plurality of electrically conductive bonding structures disposed within an underfill layer configured to prevent CTE mismatch between the IC die and the substrate;

a first adhesive layer having a first Young's modulus and disposed onto the substrate at a first plurality of positions, which are laterally located between a side of the substrate and a proximate side of the IC die; and;

a second adhesive layer having a second Young's modulus less than the first Young's modulus and disposed onto the substrate at a second plurality of positions, which are laterally located between a corner of the substrate and a proximate corner of the IC die;

a lid affixed to the substrate by the first and second adhesive layers and configured to extend to a position overlying the IC die; and

a thermal interface material (TIM) layer vertically disposed between the IC die and the lid, wherein the TIM layer and the first or second adhesive layers comprise a same material.

11. The IC package of claim 10 , wherein the first adhesive layer is disposed onto the substrate in one or more linear patterns that are interspersed between the second adhesive layer.

12. The IC package of claim 11 , wherein the second adhesive layer is disposed onto the substrate in one or more “L” shaped patterns interspersed around a perimeter of the IC die between one of the one or more linear patterns of the first adhesive layer.

13. The IC package of claim 10 , wherein the first Young's modulus is approximately three orders of magnitude larger than the second Young's modulus.

14. The IC package of claim 10 ,

wherein the first Young's modulus is in a range of between approximately 5 GPa and approximately 10 GPa; and

wherein the second Young's modulus is in a range of between approximately 2MPa and approximately 8 MPa.

15. The IC package of claim 10 , wherein the first adhesive layer is separated from the second adhesive layer by spaces that form openings in the IC package located between the lid and the substrate.

16. The IC package of claim 10 , wherein the electrically conductive bonding structure comprises a flip-chip solder balls connected between a BEOL metallization layer on the IC die and the substrate.

17. A method of forming an integrated chip (IC) package, comprising:

bonding an integrated chip (IC) die is to a substrate using an electrically conductive bonding structure disposed within an underfill layer configured to prevent CTE mismatch between the IC die and the substrate;

selectively depositing a first adhesive layer onto the substrate at a first plurality of positions surrounding the IC die;

selectively depositing a second adhesive layer, having a second Young's modulus that is less than a first Young's modulus of the first adhesive layer, onto the substrate at a second plurality of positions surrounding the IC die, wherein the second adhesive layer has an ‘L’ shape comprising two connected orthogonal legs separated from the first adhesive layer by spaces having different sizes; and

bringing a lid into contact with the first and second adhesive layers.

18. The method of claim 17 ,

wherein the first Young's modulus is approximately three orders of magnitude larger than the second Young's modulus.

19. The IC package of claim 1 , further comprising:

a third adhesive layer disposed between the first adhesive layer and the second adhesive layer, wherein the third adhesive layer has a third Young's modulus less than the first Young's modulus and greater than the second Young's modulus.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 2, 2013
From: CHEN, CHIN-LIANG; LIN, WEI-TING; HO, KUAN-LIN; LIU, YU-CHIH; LIN, CHUN-CHENG; LIN, SHIH-YEN
To: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Reel/Frame 031698/0166 →
Continuity (1)
Related Publication 20150155221A1 · Jun 4, 2015