IP Library › Granted Patent US 9,291,640
Granted Patent B2
US 9,291,640 · App. 14/178,076 · Granted Mar 22, 2016

Method and apparatus of using peak force tapping mode to measure physical properties of a sample

Inventors: Chanmin Su (Ventura, CA); Jian Shi (Ventura, CA); Yan Hu (Ventura, CA); Shuiqing Hu (Santa Barbara, CA); Ji Ma (Thousand Oaks, CA)
Assignee: Bruker Nano, Inc.
G01Q20/00G01Q10/065G01Q60/32
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Quick Facts
Patent No.
US 9,291,640
App. No.
14/178,076
Granted
Mar 22, 2016
Kind
B2
Abstract

Methods and apparatuses are provided for automatically controlling and stabilizing aspects of a scanning probe microscope (SPM), such as an atomic force microscope (AFM), using Peak Force Tapping (PFT) Mode. In an embodiment, a controller automatically controls periodic motion of a probe relative to a sample in response to a substantially instantaneous force determined and automatically controls a gain in a feedback loop. A gain control circuit automatically tunes a gain based on separation distances between a probe and a sample to facilitate stability. Accordingly, instability onset is quickly and accurately determined during scanning, thereby eliminating the need of expert user tuning of gains during operation.

Claims (16)

1. A method of operating a scanning probe microscope (SPM) comprising:

generating relative substantially periodic motion between a probe and a sample;

detecting the motion of the probe;

recovering, from the detected probe motion, a property of the motion as the probe and sample interact in Peak Force Tapping (PFT) Mode;

determining a time zone of interest associated with the property of the motion;

generating an excitation signal between the probe and the sample; and

measuring a response of the probe to the excitation signal generating step in the time zone of interest within a period of the interaction between the probe and the sample.

2. The method of claim 1 , wherein the property is an instantaneous force between the probe and the sample.

3. The method of claim 1 , wherein the time zone of interest is a contact time (p1-p2).

4. The method of claim 1 , wherein the time zone of interest is one of a) a proximate interaction zone during approach (p2-p4), and b) a proximate interaction zone during tip retraction (p4-p5).

5. The method of claim 1 , wherein the time zone of interest is gated, and the excitation signal is one of a group including a constant voltage and a synchronously gated voltage, and a signal associated with the detected probe motion is one of group including a current and a resistance in the gated time zone of interest.

6. The method of claim 1 , wherein the time zone of interest is gated, and wherein the excitation signal is one of a constant heat and a synchronously gated heat, and a signal based on the detected probe motion is a temperature of the probe in the gated time zone.

7. The method of claim 1 , wherein the time zone of interest is gated, and wherein the excitation signal is one of a constant microwave and a synchronously gated microwave, and a signal based on the detected motion is an impedance of the probe in the gated time zone.

8. The method of claim 1 , wherein the time zone of interest is gated, and wherein the excitation signal is one of a constant optical excitation and a synchronously gated optical excitation, and a signal based on the detected probe motion is optical spectroscopy generated by the probe in the gated time zone.

9. The method of claim 2 , wherein the measuring step is synchronized with the recovering an instantaneous force step.

10. The method of claim 2 , further comprising controlling a position of the probe based on the recovered instantaneous force, and wherein the measuring step is synchronized to at least one of the probe position and the recovered instantaneous force.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 25, 2015
From: SHI, JIAN; HU, YAN; HU, SHUIQING; MA, JI; SU, CHANMIN
To: BRUKER NANO, INC.
Reel/Frame 036415/0781 →
Continuity (5)
Division 13306867 · Nov 29, 2011
Continuation In Part 12618641 · Nov 13, 2009
Provisional Application 61417837 · Nov 29, 2010
Provisional Application 61114399 · Nov 13, 2008
Related Publication 20140230103A1 · Aug 14, 2014