Semiconductor device
A field plate electrode is repetitively disposed in a folded manner or a spiral shape in a direction along an edge of a first circuit region. A coupling transistor couples a first circuit to a second circuit lower in supply voltage than the first circuit. A second conductivity type region is disposed around the coupling transistor. A part of the field plate electrode partially overlaps with the second conductivity type region. The field plate electrode is electrically coupled to a drain electrode of the coupling transistor at a portion located on the first circuit region side from a center thereof in a width direction of the separation region. A ground potential or a power potential of the second circuit is applied to the field plate electrode at a portion located on the second conductivity type region side from the center.
1. A semiconductor device comprising:
a substrate;
a first circuit region on the substrate, the first circuit region including a first circuit having first power supply voltage;
a second circuit region on the substrate, the second circuit region including a second circuit having a second power supply voltage lower than the first power supply voltage;
a separation region, on the substrate, surrounding the first circuit region to separate the first circuit region from the second circuit region, the separation region including:
a first coupling transistor for coupling the first circuit to the second circuit, the first coupling transistor having a control electrode, a first electrode, and a second electrode, the first electrode being disposed on the side of the first circuit region, the second electrode being disposed on the side of the second circuit region; and
a layer-structured first field plate electrode at least partially surrounding the first circuit region, wherein
the first field plate electrode has a first portion, on the side of the first circuit region, coupled to the first electrode of the first coupling transistor, and a second portion, on the side of the second circuit region, coupled to a ground potential or the second circuit.
2. The semiconductor device according claim 1 , wherein the layer-structured first field plate electrode is plurally-folded one electrode at least partially surrounding the first circuit region, or one electrode spirally surrounding the first circuit region.
3. The semiconductor device according to claim 1 , wherein the first and second electrodes of the first coupling transistor are drain and source electrodes, respectively.
4. The semiconductor device according to claim 3 , wherein the first portion of the first field plate electrode is closest to the first circuit region, and electrically coupled to the drain electrode of the first coupling transistor.
5. The semiconductor device according to claim 3 , wherein the second portion of the first field plate electrode is closest to the second circuit region, and applied with a power potential or a ground potential of the second circuit.
6. The semiconductor device according to claim 1 , wherein
the separation region further includes:
a second coupling transistor for coupling the first circuit to the second circuit, the second coupling transistor having a control electrode, a first electrode, and a second electrode; and
a layer-structured second field plate electrode at least partially surrounding the first circuit region, and
the second field plate electrode has a third portion, on the side of the first circuit region, coupled to the first electrode of the second coupling transistor, and a fourth portion, on the side of the second circuit region, coupled to a ground potential or the second circuit.
7. The semiconductor device according to claim 6 , wherein
the first field plate electrode has a fifth portion closest to the second circuit region,
the second field plate electrode has a sixth portion closest to the second circuit region, the sixth portion being electrically coupled to the fifth portion.
8. The semiconductor device according to claim 1 , wherein
the source and drain electrodes are regions of a first conductivity type,
the separation region includes a region of a second conductivity type, the second conductivity type region being disposed around the first coupling transistor; and
the first field plate electrode crosses the second conductivity type region in a plan view.
9. The semiconductor device according to claim 8 , wherein a distance between an edge of the first circuit region and an innermost layer of the first field plate electrode relative to the first circuit region is greater than that between the innermost layer and a second innermost layer of the first field plate electrode.