Enhanced patterned wafer geometry measurements based design improvements for optimal integrated chip fabrication performance

1. A resolution enhancement method for wafer geometry measurements, the method comprising:

acquiring a plurality of wafer geometry images for at least one substantially identical portion of at least one wafer, wherein each of the plurality of wafer geometry images is acquired with a different sub-pixel modulation in spatial phase; and

jointly processing the plurality of wafer geometry images utilizing at least one statistical treatment to produce a resolution-enhanced representation of the plurality of wafer geometry images.

2. The method of claim 1 , wherein the at least one statistical treatment includes at least one of: a superresolution technique and a sub-pixel interpolation technique.

3. The method of claim 1 , wherein intentional shifting of an image sensor relative to the at least one wafer is utilized to provide the sub-pixel modulation in spatial phase.

4. The method of claim 1 , wherein varying at least one of: an intensity and a wavelength of an interferometer is utilized to provide the sub-pixel modulation in spatial phase.

5. The method of claim 1 , wherein the plurality of wafer geometry images are acquired by repeatedly acquiring wafer geometry images for at least one substantially identical portion of a plurality of wafers.

6. The method of claim 1 , wherein the plurality of wafer geometry images are acquired by acquiring a wafer geometry image of a wafer and obtaining the plurality of wafer geometry images representing repeating patterns present within the wafer.

7. The method of claim 1 , wherein the resolution-enhanced representation represents a resolution-enhanced topography map of the at least one portion of the at least one wafer.

8. The method of claim 7 , further comprising:

identifying at least one region within the resolution-enhanced topography map having high frequency topography variations;

determining a location for positioning at least one dummy-fill within the at least one identified region based on the at least one identified region; and

producing a modified pattern layout corresponding to the at least one wafer to include the at least one dummy-fill within the at least one identified region.

9. The method of claim 7 , further comprising:

calibrating a design simulation model at least partially based on the resolution-enhanced topography map.

10. A wafer geometry based pattern layout analysis method, the method comprising:

obtaining a first resolution-enhanced topography map for at least one portion of at least one wafer etched according to a pattern layout;

identifying at least one region within the first resolution-enhanced topography map as having high frequency topography variations;

modifying the pattern layout to include at least one dummy-fill within the at least one identified region;

obtaining a second resolution-enhanced topography map for the at least one portion of the at least one wafer etched according to the modified pattern layout;

determining an effectiveness of the modified pattern layout; and

etching a subsequent wafer based on the modified pattern layout when the modified pattern layout is determined to be effective.

11. The method of claim 10 , wherein said determining an effectiveness of the modified pattern layout further comprises:

determining whether an additional pattern layout modification is needed based on whether the second resolution-enhanced topography map has any region with high frequency topography variations.

12. The method of claim 10 , wherein obtaining a first resolution-enhanced topography map for at least one portion of at least one wafer further comprises:

acquiring a plurality of wafer geometry images for the portion of the at least one wafer, wherein each of the plurality of wafer geometry images is acquired with a different sub-pixel modulation in spatial phase; and

jointly processing the plurality of wafer geometry images utilizing at least one statistical treatment to produce the first resolution-enhanced topography map.

13. The method of claim 12 , wherein the at least one statistical treatment includes at least one of: a superresolution technique and a sub-pixel interpolation technique.

14. The method of claim 12 , wherein intentional shifting of an image sensor relative to the at least one wafer is utilized to provide the sub-pixel modulation in spatial phase.

15. The method of claim 12 , wherein varying at least one of: an intensity and a wavelength of an interferometer is utilized to provide the sub-pixel modulation in spatial phase.

16. The method of claim 12 , wherein the plurality of wafer geometry images are acquired by repeatedly acquiring wafer geometry images for at least one portion of a plurality of wafers.

17. The method of claim 12 , wherein the plurality of wafer geometry images are acquired by acquiring a wafer geometry image of a wafer and obtaining the plurality of wafer geometry images representing repeating patterns present within the wafer.

18. A wafer geometry measurement system, the system comprising:

an imaging device configured to acquire a plurality of wafer geometry images for at least one substantially identical portion of at least one wafer, wherein each of the plurality of wafer geometry images is acquired with a different sub-pixel modulation in spatial phase; and

a processor in communication with the imaging device, the processor configured to jointly process the plurality of wafer geometry images utilizing at least one statistical treatment to produce a resolution-enhanced representation of the plurality of wafer geometry images.

19. The system of claim 18 , wherein the at least one statistical treatment includes at least one of: a superresolution technique and a sub-pixel interpolation technique.

20. The system of claim 18 , wherein relative positions of the imaging device and the at least one wafer are shifted to provide the sub-pixel modulation in spatial phase.

21. The system of claim 18 , wherein at least one of: an intensity and a wavelength of an interferometer of the wafer geometry measurement system is varied to provide the sub-pixel modulation in spatial phase.

22. The system of claim 18 , wherein the imaging device acquires the plurality of wafer geometry images by repeatedly acquiring wafer geometry images for at least one substantially identical portion of a plurality of wafers.

23. The system of claim 18 , wherein the imaging device acquires the plurality of wafer geometry images by acquiring a wafer geometry image of a wafer and obtaining the plurality of wafer geometry images representing repeating patterns present within the wafer.

24. The system of claim 18 , wherein the resolution-enhanced representation represents a resolution-enhanced topography map of the at least one portion of the at least one wafer.

25. The system of claim 24 , wherein the processor is further configured to:

identify at least one region within the resolution-enhanced topography map having high frequency topography variations;

determine a location for positioning at least one dummy-fill within the at least one identified region based on the at least one identified region; and

produce a modified pattern layout corresponding to the at least one wafer to include the at least one dummy-fill within the at least one identified region.

26. The system of claim 24 , wherein the processor is further configured to:

calibrate a design simulation model at least partially based on the resolution-enhanced topography map.