Memory device
According to one embodiment, a memory device includes a first electrode, a second electrode and a variable resistance layer. The second electrode includes a metal. The metal is more easily ionizable than a material of the first electrode. The variable resistance layer is disposed between the first electrode and the second electrode. The variable resistance layer includes a first layer and a second layer. The first layer has a relatively high crystallization rate. The second layer contacts the first layer. The second layer has a relatively low crystallization rate. The first layer and the second layer are stacked along a direction connecting the first electrode and the second electrode.
1. A memory device, comprising:
a first electrode;
a second electrode including a metal, the metal being more easily ionizable than a material of the first electrode; and
a variable resistance layer disposed between the first electrode and the second electrode,
the variable resistance layer including:
a first layer having a first crystallization rate;
a second layer having a second crystallization rate lower than the first crystallization rate; and
an oxide layer disposed between the first layer and the second layer,
the first layer, the oxide layer, and the second layer being stacked along a direction connecting the first electrode and the second electrode.
2. The device according to claim 1 , further comprising a metal layer disposed between the first electrode and the variable resistance layer, the metal layer including nickel,
the first layer being nearer to the first electrode than the second layer,
the variable resistance layer including silicon,
the second electrode including silver.
3. The device according to claim 1 , wherein the first layer and the second layer include silicon, and the oxide layer includes silicon and oxygen.
4. The device according to claim 1 , wherein the crystallization rate of the first layer is at least 10% higher than the crystallization rate of the second layer.
5. The device according to claim 1 , wherein the variable resistance layer includes silicon.
6. The device according to claim 5 , wherein
an oxygen concentration in the oxide layer is higher than an oxygen concentration in the first layer, and
the oxygen concentration in the oxide layer is higher than an oxygen concentration in the second layer.
7. The device according to claim 1 , wherein the second electrode includes at least one selected from the group consisting of silver, nickel, cobalt, aluminum, and copper.
8. The device according to claim 1 , wherein a distance between the first electrode and the first layer is shorter than a distance between the first electrode and the second layer.
9. The device according to claim 1 , further comprising a metal layer disposed between the first electrode and the variable resistance layer, the metal layer including a metal more difficult to ionize than a material of the second electrode.
10. The device according to claim 9 , wherein the metal layer includes at least one selected from the group consisting of nickel, aluminum, and palladium.
11. The device according to claim 1 , wherein an oxygen concentration, a nitrogen concentration, or a total concentration of oxygen and nitrogen in the second layer is higher than an oxygen concentration, a nitrogen concentration, or a total concentration of oxygen and nitrogen in the first layer.
12. The device according to claim 1 , further comprising an insulating layer provided between the variable resistance layer and the second electrode.