Resistive memory elements, resistive memory cells, and resistive memory devices
A method of forming a resistive memory element comprises forming an oxide material over a first electrode. The oxide material is exposed to a plasma process to form a treated oxide material. A second electrode is formed on the treated oxide material. Additional methods of forming a resistive memory element, as well as related resistive memory elements, resistive memory cells, and resistive memory devices are also described.
1. A resistive memory element, comprising:
a contact plug extending through an insulation material and comprising an oxidation-resistant material;
a treated oxide material over the contact plug and comprising an oxygen-deficient oxide material and an oxy-nitride material;
a reactive material over the treated oxide material and comprising metal; and
a capping material over the reactive material and comprising another oxidation-resistant material.
2. The resistive memory element of claim 1 , wherein a concentration of nitrogen varies throughout a thickness of the treated oxide material.
3. The resistive memory element of claim 1 , wherein the oxy-nitride material comprises at least one of a hafnium oxy-nitride, a hafnium silicon oxy-nitride, a zirconium oxy-nitride, a zirconium silicon oxy-nitride, a titanium oxy-nitride, a titanium silicon oxy-nitride, a tantalum oxy-nitride, a tantalum silicon oxy-nitride, a niobium oxy-nitride, a niobium silicon oxy-nitride, a vanadium oxy-nitride, a vanadium silicon oxy-nitride, a tungsten oxy-nitride, a tungsten silicon oxy-nitride, a molybdenum oxy-nitride, a molybdenum silicon oxy-nitride, a chromium oxy-nitride, and a chromium silicon oxy-nitride.
4. The resistive memory element of claim 1 , wherein the treated oxide material comprises nitrogen up to a depth within a range of from about 1 Angstrom to about 50 Angstroms from a surface of the treated oxide material adjacent the reactive material.
5. The resistive memory element of claim 1 , wherein the reactive material comprises:
an insulative titanium oxide material on the treated oxide material; and
a conductive titanium oxide material on the insulative titanium oxide material.
6. A resistive memory cell, comprising:
an access device; and
a resistive memory element coupled to the access device and comprising:
a first electrode;
a treated oxide material on the first electrode and comprising an oxygen-deficient oxide material and an oxy-nitride material; and
a second electrode on the treated oxide material.
7. A resistive memory device, comprising:
a word line;
a bit line;
a source line; and
a resistive memory cell between the bit line and the source line and comprising:
an access device coupled to the word line;
a resistive memory element between the access device and the bit line and comprising:
a first electrode;
a second electrode; and
a treated oxide material between the first electrode and the second electrode, the treated oxide material comprising an oxygen-deficient oxide material and an oxy-nitride material.
8. The resistive memory device of claim 7 , wherein the second electrode comprises:
a reactive material on the treated oxide material and comprising hafnium, zirconium, titanium, tantalum, niobium, vanadium, molybdenum, or chromium; and
a capping material on the reactive material and comprising tungsten nitride, titanium nitride, tantalum nitride, titanium aluminum nitride, platinum, iridium, an iridium oxide, ruthenium, or a ruthenium oxide.
9. The resistive memory device of claim 8 , wherein the first electrode and the capping material each comprise tungsten nitride.
10. The resistive memory device of claim 8 , wherein the reactive material comprises:
an insulative region on the oxygen-deficient oxide material of the treated oxide material; and
a conductive region overlying the insulative region.
11. The resistive memory device of claim 10 , wherein the reactive material further comprises an unreacted region between the conductive region and the second electrode.
12. The resistive memory device of claim 10 , wherein the insulative region of the reactive material comprises a greater concentration of oxygen than the conductive region of the reactive material.
13. The resistive memory cell of claim 6 , wherein the treated oxide material is substantially free of dangling bonds.
14. The resistive memory cell of claim 6 , wherein the treated oxide material comprises at least some dangling bonds.
15. The resistive memory cell of claim 6 , wherein the treated oxide material comprises:
a first region overlying the first electrode and comprising one or more of silicon dioxide, a hafnium oxide, a zirconium oxide, a titanium oxide, a tantalum oxide, a niobium oxide, a vanadium oxide, a tungsten oxide, a molybdenum oxide, and a chromium oxide;
a second region overlying the first region and comprising one or more of a hafnium oxy-nitride, a zirconium oxy-nitride, a titanium oxy-nitride, a tantalum oxy-nitride, a niobium oxy-nitride, a vanadium oxy-nitride, a tungsten oxy-nitride, a molybdenum oxy-nitride, and a chromium oxy-nitride.
16. The resistive memory cell of claim 6 , wherein the treated oxide material comprises:
a first region overlying the first electrode and comprising one or more of a hafnium silicon oxide, a zirconium silicon oxide, a titanium silicon oxide, a tantalum silicon oxide, a niobium silicon oxide, a vanadium silicon oxide, a tungsten silicon oxide, a molybdenum silicon oxide, and a chromium silicon oxide;
a second region overlying the first region and comprising one or more of a hafnium silicon oxy-nitride, a zirconium silicon oxy-nitride, a titanium silicon oxy-nitride, a tantalum silicon oxy-nitride, a niobium silicon oxy-nitride, a vanadium silicon oxy-nitride, a tungsten silicon oxy-nitride, a molybdenum silicon oxy-nitride, and a chromium silicon oxy-nitride.
17. The resistive memory element of claim 1 , wherein the treated oxide material comprises nitrogen to a depth less than a thickness of the treated oxide material.
18. The resistive memory element of claim 17 , wherein the nitrogen is only present at a location proximate an upper surface of the treated oxide material.
19. The resistive memory element of claim 1 , wherein the treated oxide material exhibits a linear concentration distribution of nitrogen, a stepwise concentration distribution of nitrogen, or a Gaussian concentration distribution of nitrogen.
20. The resistive memory element of claim 17 , wherein a ratio of metal atoms to silicon atoms in at least a portion of the treated oxide material is within a range of from about 3:1 to about 8:1.