Electrostatic discharge devices and methods of manufacture
Electrostatic discharge (ESD) devices and methods of manufacture are provided. The method includes forming a plurality of fin structures and a mesa structure from semiconductor material. The method further includes forming an epitaxial material with doped regions on the mesa structure and forming gate material over at least the plurality of fin structures. The method further includes planarizing at least the gate material such that the gate material and the epitaxial material are of a same height. The method further includes forming contacts in electrical connection with respective ones of the doped regions of the epitaxial material.
1. A structure comprising:
a mesa structure composed of silicon on insulator material;
a fin region separate from the mesa structure with a plurality of fin structures composed of the silicon on insulator material;
epitaxial material on the mesa structure; and
a gate material over the plurality of fin structures, wherein the gate material and the epitaxial material on the mesa structure are of a same height.
2. The structure of claim 1 , wherein:
the mesa structure and the plurality of fin structures have substantially the same height;
the epitaxial material is grown crystalline material; and
the epitaxial material has a greater height than the plurality of fin structures.
3. The structure of claim 1 , wherein
the plurality of fin structures are the semiconductor material;
the mesa structure includes doped regions of the epitaxial material; and
the gate material is planarized such that the gate material and the epitaxial material are of the same height.
4. The structure of claim 3 , further comprising contacts in electrical connection with respective ones of the doped regions of the epitaxial material.
5. The structure of claim 4 , wherein the epitaxial material is a crystalline material grown on an exposed surface of the mesa structure.
6. The structure of claim 1 , wherein the epitaxial material and the mesa structure form an electrostatic discharge device of a same height as a gate structure.
7. The structure of claim 1 , wherein the plurality of fin structures and the mesa structure are formed from a silicon on insulator (SOI) material.
8. The structure of claim 7 , wherein the fin structures and mesa structure are separated by an insulating material.
9. The structure of claim 7 , further comprising nitride sidewalls on sidewalls of the epitaxial material.