Off-axis alignment system and alignment method

1. An off-axis alignment system comprising, sequentially along a transmission path of a light beam, an illumination module, an interference module and a detection module, wherein:

the illumination module comprises a light source, a multi-wavelength incident optical fiber and a beam splitter,

the detection module sequentially comprises a lens group, a polarizing means, a detection optical fiber and a photoelectric detector, and

the interference module comprises:

a polarization beam splitter having four side faces, the illumination module and the detection module both located on a first side of the polarization beam splitter;

a first quarter-wave plate and a first reflector, sequentially disposed on a second side of the polarization beam splitter opposite to the first side thereof;

a second quarter-wave plate and a cube-corner prism, sequentially disposed on a third side of the polarization beam splitter; and

a third quarter-wave plate, a second reflector and a lens, sequentially disposed on a fourth side of the polarization beam splitter opposite to the third side thereof, the second reflector located on a rear focal plane of the lens, a center of a bottom of the cube-corner prism situated on an optical axis of the lens.

2. The off-axis alignment system of claim 1 , wherein the illumination module further comprises a shutter, an optical isolator and a phase modulator.

3. The off-axis alignment system of claim 1 , wherein the light source is a laser.

4. The off-axis alignment system of claim 3 , wherein the light source supplies light comprising at least four different wavelengths, two of which are in infrared spectrum.

5. The off-axis alignment system of claim 3 , wherein the light source is a single-frequency laser, and the beam splitter is one selected from the group consisting of a grating beam splitter, a fiber-optic beam splitter and a planar light-wave circuit splitter.

6. The off-axis alignment system of claim 3 , wherein the light source is a dual-frequency laser, and the beam splitter is a laser frequency divider.

7. The off-axis alignment system of claim 6 , wherein the laser frequency divider is an electro-optic modulator or an acousto-optic modulator.

8. The off-axis alignment system of claim 1 , wherein the polarizing means is one selected from the group consisting of a dichroic polarizer, a multilayer-coating based regular polarization beam splitter and a birefringent beam splitter.

9. An off-axis alignment method using the off-axis alignment system according to claim 1 , the method comprising the steps of:

emitting a laser beam with the light source, using the beam splitter to split the laser beam into illumination beams with a plurality of wavelengths and of a plurality of orders, directing the illumination light beams onto the polarization beam splitter such that each illumination light beam is split into a first sub-beam and a second sub-beam, respectively reflecting the first and second sub-beams with the first reflector and the cube-corner prism such that the reflected first and second sub-beams are symmetrical to each other with respect to the optical axis of the lens, and passing the symmetrical first and second sub-beams through the lens such that the symmetrical first and second sub-beams are incident on an alignment mark at a same angle of incidence and are diffracted by the alignment mark for a first time;

passing the diffracted sub-beams through the lens, reflecting the diffracted sub-beams with the second reflector located on the rear focal plane of the lens, and directing the reflected diffracted sub-beams again onto the alignment mark such that the reflected diffracted sub-beams are diffracted by the alignment mark for a second time;

collecting the re-diffracted sub-beams with the lens, passing the re-diffracted sub-beams through the polarization beam splitter, the cube-corner prism and the first reflector, and making the re-diffracted sub-beams mutually superimposed at a same location on an interface of the polarization beam splitter to generate an interference signal; and

passing the interference signal through the lens group and the polarizing means to the photoelectric detector and using the photoelectric detector to determine a position of the alignment mark based on a phase variation of the interference signal.

10. The method of claim 9 , wherein the illumination module further comprises a shutter, an optical isolator and a phase modulator.

11. The method of claim 9 , wherein the light source is a laser.

12. The method of claim 11 , wherein the light source supplies light comprising at least four different wavelengths, two of which are in infrared spectrum.

13. The method of claim 11 , wherein the light source is a single-frequency laser, and the beam splitter is one selected from the group consisting of a grating beam splitter, a fiber-optic beam splitter and a planar light-wave circuit splitter.

14. The method of claim 11 , wherein the light source is a dual-frequency laser, and the beam splitter is a laser frequency divider.

15. The method of claim 14 , wherein the laser frequency divider is an electro-optic modulator or an acousto-optic modulator.

16. The method of claim 9 , wherein the polarizing means is one selected from the group consisting of a dichroic polarizer, a multilayer-coating based regular polarization beam splitter and a birefringent beam splitter.