IP Library Granted Patent US 9,484,529
Granted Patent B2
US 9,484,529 · App. 15/098,503 · Granted Nov 1, 2016

Magnetic memory device

Inventors: Jangeum Lee (Suwon-si, KR); Sechung Oh (Suwon-si, KR); Jeahyoung Lee (Seoul, KR); Woojin Kim (Yongin-si, KR); Junho Jeong (Suwon-si, KR); Woochang Lim (Hwaseong-si, KR)
Assignee: Samsung Electronics Co., Ltd.
H01L43/10H01L27/222H01L43/08
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Quick Facts
Patent No.
US 9,484,529
App. No.
15/098,503
Granted
Nov 1, 2016
Kind
B2
Abstract

A magnetic memory device is provided. The magnetic memory device includes a first vertical magnetic layer and a second vertical magnetic layer on a substrate, a tunnel barrier layer between the first vertical magnetic layer and the second vertical magnetic layer, and an exchange-coupling layer between a first sub-layer of the first vertical magnetic layer and a second sub-layer of the first vertical magnetic layer.

Claims (33)

1. A memory device comprising:

a free layer including Co;

a reference layer comprising;

a first contact magnetic layer including CoFeB;

a vertical magnetic layer including a first sub-layer layer and a second sub-layer; and

an exchange coupling layer disposed between the first sub-layer and the second sub-layer; and

a tunnel barrier layer disposed between the free layer and the reference layer.

2. The memory device of claim 1 , wherein the free layer further comprises Fe.

3. The memory device of claim 2 , wherein the free layer further comprises B.

4. The memory device of claim 3 , wherein the free layer further comprises Ni.

5. The memory device of claim 1 , further comprising a capping layer on the free layer.

6. The memory device of claim 5 , wherein the capping layer includes at least one of Ta, TaN or TiN.

7. The memory device of claim 1 , wherein the first sub-layer includes Co.

8. The memory device of claim 7 , wherein the first sub-layer further comprises Ir.

9. The memory device of claim 7 , wherein the second sub-layer includes Co.

10. The memory device of claim 9 , wherein the second sub-layer further comprises Pt.

11. The memory device of claim 1 , wherein the exchange coupling layer includes at least one of Ru, Rh, Cr or Ir.

12. A memory device comprising:

a first magnetic layer;

a non-magnetic layer on the first magnetic layer;

a second magnetic layer on the non-magnetic layer, the non-magnetic layer disposed between the first magnetic layer and the second magnetic layer;

a junction magnetic layer on second magnetic layer;

a tunnel barrier on the junction magnetic layer, the junction magnetic layer disposed between the first magnetic layer and the tunnel barrier;

a free layer on the tunnel barrier, the tunnel barrier disposed between the free layer and the junction magnetic layers; and

a capping layer.

13. The memory device of claim 12 , wherein magnetization directions of the first and second magnetic layers are perpendicular with respect to a plane of the tunnel barrier.

14. The memory device of claim 12 , wherein the junction magnetic layer comprises at least one of cobalt (Co), iron (Fe), or nickel (Ni).

15. The memory device of claim 12 , wherein the first magnetic layer comprise at least one of cobalt (Co) or platinum (Pt).

16. The memory device of claim 12 , wherein the first magnetic layer comprise at least one of Ta, Al, Cu, Au, Ag, TaN, or TiN.

17. The memory device of claim 12 , wherein the non-magnetic layer comprises an exchange coupling layer.

18. The memory device of claim 17 , wherein the exchange coupling layer comprise at least one of Ru, Rh, Cr or Ir.

19. The memory device of claim 12 , wherein the first magnetic layer, the non-magnetic layer and the second magnetic layer comprises a reference layer.

20. The memory device of claim 12 , wherein the first magnetic layer includes at least one of Co or Pt.

Priority Claims (1)
KR 10-2010-0037017 · Apr 21, 2010 · national
Continuity (5)
Continuation 14583831 · Dec 29, 2014
Continuation 14464835 · Aug 21, 2014
Continuation 13926048 · Jun 25, 2013
Continuation 13091215 · Apr 21, 2011
Related Publication 20160233417A1 · Aug 11, 2016