Semiconductor device structure and manufacturing method thereof
View Patent ↗Some embodiments of the present disclosure provide a semiconductor device. The semiconductor device includes a semiconductive substrate; a gate structure over a fin structure of the semiconductive substrate; a channel portion of the fin structure under the gate structure; and at least one epitaxy region disposed over the semiconductive substrate and in contact with the channel portion. The epitaxy region includes a substance with a first lattice constant larger than a second lattice constant of the semiconductive substrate; and a concentration profile of the substance in the epitaxy region being decreasing from near a bottom portion to near a top portion. The bottom portion is closer to the channel portion than the top portion.
1. A semiconductor device comprising:
a semiconductive substrate;
a gate structure over a fin structure of the semiconductive substrate;
a channel portion of the fin structure under the gate structure;
at least one epitaxy region disposed over the semiconductive substrate and in contact with the channel portion, and
the epitaxy region comprising a substance with a first lattice constant larger than a second lattice constant of the semiconductive substrate, wherein the epitaxy region comprises a bottom portion and a middle portion, the bottom portion is closer to the channel portion than the middle portion, a concentration profile of the substance in the bottom portion is substantially constant, and the concentration profile of the substance in the middle portion decreases monotonically from near the bottom portion.
2. The semiconductor structure of claim 1 , wherein the substance is selected from a group four element in a periodic table.
3. The semiconductor device of claim 1 , wherein the epitaxy region comprises a highest concentration of the substance in the middle portion near the bottom portion.
4. The semiconductor device of claim 1 , wherein the epitaxy region comprises a top portion, the middle portion is between the bottom portion and the top portion, and the concentration profile of the substance in the top portion is substantially constant.
5. The semiconductor device of Claim 4 , wherein the concentration profile of the substance is higher in the bottom portion than in the top portion.
6. The semiconductor device of claim 1 , wherein the concentration profile of the substance in the bottom portion is lower than a lowest concentration of the concentration profile of the substance in the middle portion.
7. A semiconductor device comprising:
a semiconductive substrate comprising a fin structure;
a sidewall spacer of a gate structure in contact with a channel portion of the fin structure;
at least one epitaxy region disposed over the semiconductive substrate and in contact with the channel portion and the gate structure, and the epitaxy region comprising:
a bulk portion between a bottom portion and a top portion, and the bottom portion being closer to the channel portion than the top portion; and
a substance with a first lattice constant larger than a second lattice constant of the channel portion; a concentration profile of the substance in the bottom portion is substantially constant, the concentration profile of the substance in the bulk portion decreases monotonically from near the bottom portion to near the top portion, and the concentration profile of the substance in the top portion is substantially constant.
8. The semiconductor structure of claim 7 , wherein the substance is selected from a group four element in a periodic table, and the epitaxy region comprising a positive dopant.
9. The semiconductor device of claim 7 , wherein the bulk portion near the bottom portion is closer to the semiconductive substrate than the bulk portion near the top portion.
10. The semiconductor device of claim 7 , wherein the channel portion is in contact with the bulk portion or the bottom portion of the epitaxy region.
11. The semiconductor device of claim 7 , wherein the epitaxy region in between isolation regions is smaller than the epitaxy region above the isolation regions.
12. A semiconductor device comprising:
a semiconductive substrate comprising a fin structure protruding above the semiconductive substrate;
a channel portion of the fin structure partially inside a gate structure;
at least one epitaxy region above the fin structure and partially in contact with the channel portion and the gate structure, and the epitaxy region comprising:
a second portion between a first portion and a third portion, and the first portion being closer to the semiconductive substrate than the third portion; and
a substance with a first lattice constant larger than a second lattice constant of the semiconductive substrate; a concentration profile of the substance being decreasing in the second portion from near the first portion to near the third portion, the concentration profile of the substance comprises a his hest concentration of the substance in the second portion near the first portion.
13. The semiconductor device of claim 12 , wherein the first portion is closer to the channel portion than the third portion.
14. The semiconductor device of claim 12 , wherein the first portion comprises a first average concentration of the substance; and the second portion comprises a second average concentration of the substance, and the first average concentration of the substance is substantially lower than the second average concentration of the substance.
15. The semiconductor device of claim 12 , wherein the first portion comprises a first average concentration of the substance; and the third portion comprises a third average concentration of the substance, and the third average concentration of the substance is substantially equal to or lower than the first average concentration of the substance.
16. The semiconductor device of claim 12 , wherein the first portion comprises a first average concentration of the substance; and the third portion comprises a third average concentration of the substance, and a lowest concentration of the substance in the second portion is higher than the first average concentration of the substance or the third average concentration of the substance.