Cleaning of deposition device by injecting cleaning gas into deposition device
Embodiments relate to a deposition device that operates in two modes: a deposition mode, and a cleaning mode. In the deposition mode, modular injectors inject materials onto a substrate to form a layer. In the cleaning mode, the deposition device is cleaned without disassembly by injecting a cleaning gas. The injector module assembly may be cleaned in the cleaning mode by injecting cleaning gas through an exhaust for removing reactant precursor and routing the cleaning gas from the exhaust to another exhaust for removing source precursor. Alternatively, the injector module assembly is cleaned by injecting cleaning gas into a passage between an injector for injecting a source precursor and another injector for injecting a reactant precursor, and routing the cleaning gas to one of the exhausts in the cleaning mode.
1. A method of operating an injector module assembly, comprising:
injecting first gas for depositing a first material onto a substrate by a first reaction chamber in a deposition mode;
discharging, away from the substrate, the first gas remaining after injecting the first gas onto the substrate through a first exhaust in the deposition mode;
injecting separation gas into a passage by a separation gas injector to prevent the first gas from entering a second exhaust in the deposition mode;
injecting second gas for removing a second material deposited on the injector module assembly through the first exhaust of the injector module assembly in a cleaning mode;
injecting the separation gas into the passage by the separation gas injector to prevent the second gas from entering the separation gas injector in the cleaning mode; and
routing the second gas from the first exhaust to the second exhaust of the injector module assembly in the cleaning mode through the passage to remove the second material deposited on a portion of the injector module assembly between the first exhaust and the second exhaust.
2. The method of claim 1 , further comprising discharging, away from another substrate, the second gas through the second exhaust in the cleaning mode, wherein the second material deposited in the second exhaust is removed by the second gas.
3. The method of claim 1 , further comprising:
injecting third gas by a second injection chamber in the deposition mode onto the substrate to deposit the first material; and
injecting the separation gas by the second injection chamber in the cleaning mode to prevent the second gas from entering the second injection chamber.
4. A method of operating an injector module assembly, comprising:
injecting first gas for depositing a first material onto a substrate by a first reaction chamber in a deposition mode;
discharging, away from the substrate, the first gas remaining after injecting the first gas onto the substrate through a first exhaust in the deposition mode;
injecting second gas for removing a second material deposited on the injector module assembly through the first exhaust of the injector module assembly in a cleaning mode; and
routing the second gas from the first exhaust to a second exhaust of the injector module assembly in the cleaning mode to remove the second material deposited on a portion of the injector module assembly between the first exhaust and the second exhaust,
wherein the second gas is generated by injecting plasma radicals of inert gas and causing cleaning source gas to come in contact with the plasma radicals of the inert gas to produce dissociated species for the second gas.
5. The method of claim 4 , wherein the cleaning source gas includes at least one of NF 3 , F 2 , and SF 6 , or at least one of ClF 3 , and Cl 2 .
6. A method of operating an injector module assembly, comprising:
injecting source gas onto a substrate by a source injector in a deposition mode;
discharging the source gas from the injector module assembly through a source exhaust in the deposition mode;
injecting reactant gas onto the substrate by a reactant injector in the deposition mode;
discharging the reactant gas from the injector module assembly through a reactant exhaust in the deposition mode;
injecting separation gas by a separation gas injector between the source injector and the reactant injector to separate the source gas and the reactant gas in the deposition mode;
injecting cleaning gas by the separation gas injector in a cleaning mode; and
routing the cleaning gas to one of the source exhaust and the reactant exhaust to remove materials deposited in the source exhaust or the reactant exhaust in the cleaning mode.
7. The method of claim 6 , wherein the cleaning gas is routed to one of the source exhaust and the reactant exhaust by controlling a pressure of the source exhaust and a pressure of the reactant exhaust.
8. The method of claim 6 , wherein the cleaning gas is generated by generating plasma in the separation gas injector with cleaning source gas.
9. The method of claim 8 , wherein the cleaning source gas includes at least one of NF 3 , F 2 , and SF 6 , or at least one of ClF 3 , and Cl 2 .
10. The method of claim 8 , wherein the plasma is generated by applying electric signal across electrodes of the separation gas injector.
11. The method of claim 4 , further comprising discharging, away from another substrate, the second gas through the second exhaust in the cleaning mode, wherein the second material deposited in the second exhaust is removed by the second gas.
12. The method of claim 4 , further comprising:
injecting third gas by a second injection chamber in the deposition mode onto the substrate to deposit the first material; and
injecting separation gas by the second injection chamber in the cleaning mode to prevent the second gas from entering the second injection chamber.