Semiconductor device including gate structure for threshold voltage modulation in transistors and method for fabricating the same
A method for fabricating a semiconductor device includes forming an NMOS region and a PMOS region in a substrate, forming a first stack layer including a first gate dielectric layer and a first work function layer that is disposed over the first gate dielectric layer and contains aluminum, over the PMOS region of the substrate, forming a second stack layer including a second gate dielectric layer, a threshold voltage modulation layer that is disposed over the second gate dielectric layer and contains lanthanum, and a second work function layer that is disposed over the threshold voltage modulation layer, over the NMOS region of the substrate, and annealing the first stack layer and the second stack layer, thereby forming a first dipole-interface by diffusion of the aluminum in the first gate dielectric layer and a second dipole-interface by diffusion of the lanthanum in the second gate dielectric layer, respectively.
1. A semiconductor device including an N channel transistor and a P channel transistor,
wherein the P channel transistor comprises
a first metal gate electrode that includes a first titanium nitride layer containing aluminum,
a reaction preventing layer that is disposed over the first metal gate electrode and consisting of polysilicon,
a non-work function layer that is formed over the reaction preventing layer,
a first gate dielectric layer that is disposed under the first metal gate electrode and has a first dipole-interface by diffusion of the aluminum, and
a germanium-containing channel region under the first gate dielectric layer; and
wherein the N channel transistor comprises
a second metal gate electrode that includes a second titanium nitride layer of a thickness thinner than that of the first titanium nitride layer,
a threshold voltage modulation layer that is disposed under the second metal gate electrode layer and contains a lanthanum series element, and
a second gate dielectric layer that is disposed under the threshold voltage modulation layer and has a second dipole-interface by diffusion of the lanthanum series element,
wherein the non-work function layer and the second metal gate electrode comprises the same material,
wherein the P channel transistor further comprises a non-threshold voltage modulation layer is formed between the reaction preventing layer and the non-work function layer, and
wherein the non-threshold voltage modulation layer and the threshold voltage modulation layer comprises the same material.
2. The semiconductor device according to claim 1 , wherein the P channel transistor further comprises a first capping layer over the non-work function layer, and a first metal silicide layer over the first capping layer.
3. The semiconductor device according to claim 1 , wherein the N channel transistor further comprises a second capping layer disposed over the second metal gate electrode, and a second metal silicide layer over the second capping layer.
4. The semiconductor device according to claim 1 , wherein each of the first gate dielectric layer and the second gate dielectric layer comprises a stack of an interface layer and a high-k dielectric layer, and the first dipole-interface is formed on an interface of the interface layer and the high-k dielectric layer of the first gate dielectric layer and the second dipole-interface is formed on an interface of the interface layer and the high-k dielectric layer of the second gate dielectric layer.