Bonded processed semiconductor structures and carriers
Methods of fabricating semiconductor structures include implanting atom species into a carrier die or wafer to form a weakened region within the carrier die or wafer, and bonding the carrier die or wafer to a semiconductor structure. The semiconductor structure may be processed while using the carrier die or wafer to handle the semiconductor structure. The semiconductor structure may be bonded to another semiconductor structure, and the carrier die or wafer may be divided along the weakened region therein. Bonded semiconductor structures are fabricated using such methods.
1. A semiconductor structure, comprising:
at least one bonded semiconductor structure including two or more processed semiconductor structures that are attached together along a first direct bonded interface therebetween, the first direct bonded interface including direct metal-to-metal atomic bonds and direct dielectric-to-dielectric atomic bonds; and
a temporary carrier die or wafer directly bonded to one processed semiconductor structure of the at least one bonded semiconductor structure along a second direct bonded interface therebetween, the second direct bonded interface comprising direct atomic or molecular bonds between at least one of silicon oxide and silicon nitride on a first side of the second direct bonded interface, and at least one of silicon, silicon oxide, and silicon nitride on a second side of the second direct bonded interface, the temporary carrier die or wafer having a weakened zone comprising a plurality of implanted ions therein at an average depth from a surface of the temporary carrier die or wafer bonded to the one processed semiconductor structure of the at least one bonded semiconductor structure.
2. The semiconductor structure of claim 1 , wherein the two or more processed semiconductor structures are structurally and electrically coupled together at least partially by through wafer interconnects.
3. The semiconductor structure of claim 1 , wherein the two or more processed semiconductor structures are directly bonded together without using an adhesive material therebetween.
4. The semiconductor structure of claim 1 , wherein at least one of the two or more processed semiconductor structures comprises a substrate and a device region on the substrate, the device region including a plurality of device structures.
5. The semiconductor structure of claim 4 , wherein the substrate has a warp of less than about thirty micrometers (30 μm), a bow of less than about ten micrometers (10 μm), and a total thickness variation of less than about one micrometer (1 μm).
6. The semiconductor structure of claim 4 , wherein the plurality of device structures includes a plurality of through wafer interconnects extending through the device region and at least partially through the substrate.
7. The semiconductor structure of claim 6 , wherein at least one of the through wafer interconnects is exposed at a back surface of the substrate.
8. The semiconductor structure of claim 1 , further comprising a bonding material between the temporary carrier die or wafer and the at least one bonded semiconductor structure.
9. The semiconductor structure of claim 8 , wherein the bonding material comprises at least one of an oxide, a nitride, and an oxynitride.
10. The semiconductor structure of claim 1 , wherein the two or more processed semiconductor structures include a stack of processed semiconductor structures, each processed semiconductor structure comprising a die or wafer including at least a portion of an integrated circuit.
11. The semiconductor structure of claim 10 , wherein the processed semiconductor structures of the stack are bonded together using metal-to-metal bonds between active conductive features of the processed semiconductor structures.
12. The semiconductor structure of claim 10 , wherein the temporary carrier die or wafer is a temporary carrier wafer.
13. The semiconductor structure of claim 12 , wherein the stack of processed semiconductor structures comprises at least one semiconductor wafer.
14. A method of fabricating a semiconductor structure, comprising:
forming a first semiconductor structure including at least a portion of an integrated circuit on a first substrate;
implanting ions into a carrier wafer to form a weakened region within the carrier wafer;
directly bonding the carrier wafer to a first side of the first semiconductor structure and forming a direct bonded interface therebetween, the direct bonded interface comprising direct atomic or molecular bonds between at least one of silicon oxide and silicon nitride on a first side of the direct bonded interface, and at least one of silicon, silicon oxide, and silicon nitride on a second side of the second direct bonded interface;
processing the first semiconductor structure while the carrier wafer is attached to the first semiconductor structure using the carrier wafer to handle the first semiconductor structure;
directly bonding a second semiconductor structure to a second side of the first semiconductor structure opposite the first side of the semiconductor structure to which the carrier wafer is directly bonded and forming another direct bonded interface therebetween, the another direct bonded interface including direct metal-to-metal atomic bonds and direct dielectric-to-dielectric atomic bonds; and
separating a layer of material from the carrier wafer from a remaining portion of the carrier wafer along the weakened region therein.
15. The method of claim 14 , wherein processing the first semiconductor structure comprises removing a portion of the first substrate from the second side of the first semiconductor structure and exposing at least one conductive structure of the at least a portion of the integrated circuit of the first semiconductor structure.
16. The method of claim 15 , wherein directly bonding the second semiconductor structure to the second side of the first semiconductor structure comprises directly bonding the at least one conductive structure of the at least a portion of the integrated circuit of the first semiconductor structure to at least one conductive element of the second semiconductor structure.
17. The method of claim 14 , wherein directly bonding the second semiconductor structure to the second side of the first semiconductor structure comprises directly bonding at least one of a semiconductor material and an oxide material of the second semiconductor structure to at least one of a semiconductor material and an oxide material of the first semiconductor structure.
18. The method of claim 14 , wherein the direct bonding of the second semiconductor structure to the second side of the first semiconductor structure results in the separating of the layer of material from the carrier wafer along the weakened region therein.
19. The method of claim 14 , wherein the direct bonding of the carrier wafer to the first side of the first semiconductor structure comprises weakening the carrier wafer along the weakened region therein without dividing the carrier wafer along the weakened region therein.