Backside redistribution layer (RDL) structure

1. A method comprising:

forming and patterning a passivation layer over a carrier substrate;

forming a plurality of bond pads over the patterned passivation layer;

forming a plurality of through vias on the plurality of bond pads, the plurality of through vias extending in a direction perpendicular to a major surface of the carrier substrate;

attaching a first die to the patterned passivation layer;

encapsulating the plurality of through vias and the first die with a molding compound;

removing the carrier substrate; and

patterning the patterned passivation layer to form a plurality of recesses in the patterned passivation layer, the plurality of bond pads being exposed in the recesses of the patterned passivation layer, each of the plurality of bond pads having sidewalls that taper in a direction away from the molding compound, bottommost surfaces of the plurality of bond pads being level with a bottommost surface of the patterned passivation layer, the bottommost surfaces of the plurality of bond pads and the bottommost surface of the patterned passivation layer facing away from the molding compound.

2. The method of claim 1 further comprising:

before the removing the carrier substrate, forming a redistribution layer over the plurality of through vias, the first die, and the molding compound, the redistribution layer being electrically coupled to at least one of the plurality of through vias, the redistribution layer being electrically coupled to the first die; and

forming a plurality of conductive connectors over and coupled to the redistribution layer.

3. The method of claim 1 , wherein the forming the plurality of bond pads over the patterned passivation layer further comprises conformally forming the plurality of bond pads over the patterned passivation layer.

4. The method of claim 1 further comprising:

forming a solder joint in at least one of the plurality of recesses, the solder joint contacting a top surface and sidewalls of the respective bond pad in the at least one of the plurality of recesses.

5. The method of claim 1 , wherein second portions of the plurality of bond pads are embedded in the molding compound.

6. The method of claim 1 , wherein diameters of the plurality of bond pads are greater than diameters of the plurality of through vias.

7. A method comprising:

attaching a backside surface of a first die to a first side of a passivation layer, the first die having an active surface and the backside surface, the active surface being opposite the backside surface, the active surface of the first die comprising a plurality of contact pads, the backside surface of the first die facing the first side of the passivation layer;

encapsulating the first die in a molding compound, the molding compound having a first side and a second side, the second side being opposite the first side;

forming a metal via extending through the molding compound from the first side to the second side of the molding compound;

forming a redistribution layer bond pad capping the metal via;

recessing a second side of passivation layer to expose the redistribution layer bond pad, the second side of the passivation layer being opposite the first side, a first portion of the redistribution layer bond pad being within the passivation layer recess and projecting above the first side of the molding compound; and

forming a solder joint contacting a top surface and sidewalls of the redistribution layer bond pad, the solder joint being at least partially within the passivation layer recess.

8. The method of claim 7 , wherein a second portion of the redistribution layer bond pad is embedded in the molding compound.

9. The method of claim 7 , wherein a diameter of the redistribution layer bond pad is greater than a diameter of the metal via.

10. The method of claim 7 , wherein the sidewalls of the first portion of the redistribution layer bond pad projecting above the first side of the molding compound are spaced apart from sidewalls of the passivation layer.

11. The method of claim 7 , wherein a diameter of the top surface of the redistribution layer bond pad is less than or equal to a diameter of a sidewall base of the redistribution layer bond pad.

12. The method of claim 7 , wherein a height of the redistribution layer bond pad disposed above the molding compound is greater than or equal to a height of the passivation layer.

13. The method of claim 7 , wherein a diameter d 1 of the top surface of the redistribution layer bond pad satisfies the formula: d 1 =d 2 −2[h 1 (tan θ 2 )], where d 2 is a diameter of a sidewall base of the redistribution layer bond pad, h 1 is a height of the passivation layer, and θ 2 is a profile angle of the redistribution layer bond pad defined by sidewalls and a plane extending between a top surface of bond pad legs.

14. The method of claim 7 , wherein a first plane intersects the first portion of the redistribution layer bond pad and the passivation layer, the first plane being parallel to the backside surface of the first die.

15. A method comprising:

forming a passivation layer over a carrier substrate;

patterning the passivation layer to form a plurality of openings therein, a width of each of the plurality of openings decreasing as the plurality of openings extend though the passivation layer toward the carrier substrate;

conformally depositing a first conductive layer over the patterned passivation layer and in the plurality of openings;

forming a plurality of conductive features on the first conductive layer;

patterning the first conductive layer into a plurality of bond pads, each of the plurality of conductive features being on a respective one of the plurality of bond pads, each of the plurality of bond pads having sidewalls within a respective one of the plurality of openings, the sidewalls tapering in a direction toward the carrier substrate;

attaching a first die to the patterned passivation layer;

encapsulating the plurality of conductive features and the first die with a molding compound, the encapsulated plurality of conductive features extending through the molding compound to form a plurality of through vias;

removing the carrier substrate; and

patterning the patterned passivation layer to form a plurality of recesses in the patterned passivation layer, the plurality of bond pads having first portions exposed in the recesses of the patterned passivation layer.

16. The method of claim 15 further comprising:

before the removing the carrier substrate, forming a redistribution layer over the plurality of through vias, the first die, and the molding compound, the redistribution layer being electrically coupled to at least one of the plurality of through vias, the redistribution layer being electrically coupled to the first die; and

forming a plurality of conductive connectors over and coupled to the redistribution layer.

17. The method of claim 15 further comprising:

forming a solder joint in at least one of the plurality of recesses, the solder joint contacting a top surface and sidewalls of the respective bond pad in the at least one of the plurality of recesses.

18. The method of claim 15 , wherein second portions of the plurality of bond pads are embedded in the molding compound.

19. The method of claim 18 , wherein a portion of the passivation layer separates second portions of the plurality of bond pads from the first portions of the plurality of bond pads.

20. The method of claim 15 , wherein the tapered sidewalls of the plurality of bond pads taper in a direction away from the molding compound.