Semiconductor device and manufacturing method thereof
When a transistor having bottom gate bottom contact structure is manufactured, for example, a conductive layer constituting a source and a drain has a three-layer structure and two-step etching is performed. In the first etching process, an etching method in which the etching rates for at least the second film and the third film are high is employed, and the first etching process is performed until at least the first film is exposed. In the second etching process, an etching method in which the etching rate for the first film is higher than that in the first etching process and the etching rate for a “layer provided below and in contact with the first film” is lower than that in the first etching process is employed. The side wall of the second film is slightly etched when a resist mask is removed after the second etching process.
1. A method for manufacturing a semiconductor device, comprising the steps of:
forming an oxide semiconductor layer;
forming a stack of conductive films on the oxide semiconductor layer, wherein the stack comprises a first conductive film on the oxide semiconductor layer, a second conductive film on the first conductive film, and a third conductive film on the second conductive film;
selectively etching the stack until the first conductive film is exposed, and
selectively etching the first conductive film until the oxide semiconductor layer is exposed,
wherein the oxide semiconductor layer is not overlapped with a first end portion of the first conductive film, a first end portion of the second conductive film, and a first end portion of the third conductive film, and
wherein the first end portions of the first conductive film, the second conductive film, and the third conductive film are not aligned with each other.
2. The method according to claim 1 , wherein in the step of selectively etching the first conductive film, an etching rate for the first conductive film is higher than that in the step of selectively etching the stack, and an etching rate for the oxide semiconductor layer is lower than that in the step of selectively etching the stack.
3. The method according to claim 1 ,
wherein the second conductive film has higher conductivity than each of the first conductive film and the third conductive film, and
wherein the second conductive film is thicker than each of the first conductive film and the third conductive film.
4. The method according to claim 1 ,
wherein each of the first conductive film and the third conductive film comprises titanium, and
wherein the second conductive film comprises aluminum.
5. The method according to claim 1 ,
wherein the first end portion of the third conductive film is provided on an upper surface of the second conductive film, and
wherein the first end portion of the second conductive film is provided on an upper surface of the first conductive film.
6. The method according to claim 1 , further comprising steps of:
forming a resist mask on the stack before the step of selectively etching the stack; and
removing the resist mask after the step of selectively etching the first conductive film.
7. The method according to claim 1 , further comprising steps of:
forming an insulating layer covering the oxide semiconductor layer and the stack after the step of selectively etching the first conductive film; and
forming an electrode over the insulating layer to overlap with the oxide semiconductor layer.
8. A method for manufacturing a semiconductor device, comprising the steps of:
forming an oxide semiconductor layer;
forming a stack of conductive films over the oxide semiconductor layer, the stack comprises a first conductive film on the oxide semiconductor layer, a second conductive film on the first conductive film, and a third conductive film on the second conductive film;
selectively etching the stack until the first conductive film is exposed, and
selectively etching the first conductive film until the oxide semiconductor layer is exposed,
wherein the oxide semiconductor layer is not overlapped with a first end portion of the first conductive film, a first end portion of the second conductive film, and a first end portion of the third conductive film and is overlapped with a second end portion of the first conductive film, a second end portion of the second conductive film, and a second end portion of the third conductive film,
wherein the first end portions of the first conductive film, the second conductive film, and the third conductive film are not aligned with each other, and
wherein the second end portions of the first conductive film, the second conductive film, and the third conductive film are not aligned with each other.
9. The method according to claim 8 , wherein in the step of selectively etching the first conductive film, an etching rate for the first conductive film is higher than that in the step of selectively etching the stack, and an etching rate for the oxide semiconductor layer is lower than that in the step of selectively etching the stack.
10. The method according to claim 8 ,
wherein the second conductive film has higher conductivity than each of the first conductive film and the third conductive film, and
wherein the second conductive film is thicker than each of the first conductive film and the third conductive film.
11. The method according to claim 8 , wherein the first conductive film is thicker than the third conductive film.
12. The method according to claim 8 ,
wherein each of the first conductive film and the third conductive film comprises titanium, and
wherein the second conductive film comprises aluminum.
13. The method according to claim 8 ,
wherein the second end portion of the third conductive film is provided on an upper surface of the second conductive film,
wherein the second end portion of the second conductive film is provided on an upper surface of the first conductive film, and
wherein the second end portion of the first conductive film is provided on an upper surface of the oxide semiconductor layer.
14. The method according to claim 8 , further comprising steps of:
forming a resist mask on the stack before the step of selectively etching the stack; and
removing the resist mask after the step of selectively etching the first conductive film.
15. The method according to claim 8 , further comprising steps of:
forming an insulating layer covering the oxide semiconductor layer and the stack after the step of selectively etching the first conductive film; and
forming an electrode over the insulating layer to overlap with the oxide semiconductor layer.