Spacer, spacer transferring method, processing method and processing apparatus

1. A processing apparatus where a plurality of target objects to be processed are accommodated within a holder in such a manner that at least two target objects at a time are supported at their edges, where bottom surfaces of the at least two target objects are facing each other, to form a stack and where the holder accommodating the plurality of target objects are transferred into the apparatus to perform a process upon top surfaces of the plurality of target objects, the processing apparatus comprising:

a transfer mechanism including two fixing pieces; and

a spacer including two protrusions that protrude from an outer periphery of the spacer at a distance from each other and are located outside of outer portions of the two fixing pieces of the transfer mechanism, which is configured to transfer the spacer such that the outer portions of the two fixing pieces are engaged with the two protrusions when the two fixing pieces contact the outer periphery of the spacer,

wherein the spacer is removably disposed in the holder, and

wherein the two protrusions serve to locate the spacer in place when the spacer is fixed by the transfer mechanism in such a way that the two protrusions rotate or move the spacer in case the spacer is deviated from a predetermined transfer position when the spacer is engaged with the transfer mechanism.

2. The processing apparatus of claim 1 , wherein each of the two protrusions has a tapered shape having a narrower width along a radially outward direction from the outer periphery the spacer, and

wherein the transfer mechanism includes the two fixing pieces configured to move toward the spacer while the transfer mechanism is changed from a state where the spacer is engaged with the transfer mechanism to a state where the spacer is fixed by the transfer mechanism, and

wherein, during the transfer mechanism being changed to the state where the spacer is fixed by the transfer mechanism, one of the two fixing pieces contacts with one of the two protrusions and further movement of the two fixing pieces toward the spacer allows the spacer to rotate or move by movement of one of the two protrusions caused by a contact with one of the two fixing pieces in conformity with the tapered shape of the two protrusions in case the spacer is deviated from the predetermined transfer position when the spacer is engaged with the transfer mechanism.

3. A spacer transferring method for use in a processing apparatus where a plurality of target objects to be processed are accommodated within a holder in such a manner that at least two target objects at a time are supported at their edges, where bottom surfaces of the at least two target objects are facing each other, to form a stack and wherein the holder accommodating the plurality of target objects are transferred into the apparatus to perform a process upon top surfaces of the plurality of target objects, the method comprising:

engaging a spacer with a transfer mechanism, the spacer being provided with two protrusions formed to protrude from an outer periphery of the spacer at a distance from each other and located outside of outer portions of two fixing pieces of the transfer mechanism, which is configured to transfer the spacer such that the outer portions of the two fixing pieces are engaged with the two protrusions when the two fixing pieces contact the outer periphery of the spacer,

moving the two fixing pieces of the transfer mechanism toward the spacer to fix the spacer in such a way that the spacer rotates or moves to be located in place by a contact between the two fixing pieces and the two protrusions, when the spacer is deviated from a predetermined transfer position, and

transferring the spacer to removably dispose the spacer in the holder.

4. A processing method comprising:

forming a stack by accommodating a spacer in a holder in such a manner that two target objects to be processed are supported at their edges, with bottom surfaces of the objects facing each other; and

transferring the holder accommodating therein a plurality of stacks into a process apparatus to perform a process upon top surfaces of the target objects,

wherein the forming the stack comprises:

disposing a first target object on a predetermined position of the holder with a bottom surface thereof facing upward;

engaging a spacer with a transfer mechanism configured to transfer the spacer, the spacer being provided with at least two protrusions formed to protrude from an outer periphery of the spacer at a distance from each other and located outside of outer portions of two fixing pieces of the transfer mechanism, which is configured to transfer the spacer such that the outer portions of the two fixing pieces are engaged with the two protrusions when the two fixing pieces contact the outer periphery of the spacer;

moving the two fixing pieces of the transfer mechanism toward the spacer to fix the spacer in such a way that the spacer rotates or moves to be located in place by a contact between the two fixing pieces and the two protrusions, when the spacer is deviated from a predetermined transfer position;

transferring the spacer to dispose the spacer on the first target object disposed with the bottom surface thereof facing upward; and

disposing a second target object on the spacer with a bottom surface thereof facing downward, and

wherein the spacer is removable from the holder.