Silicon carbide semiconductor device
A gate insulating film is provided on a trench. The gate insulating film has a trench insulating film and a bottom insulating film. The trench insulating film covers each of a side wall and a bottom portion. The bottom insulating film is provided on the bottom portion with a trench insulating film being interposed therebetween. The bottom insulating film has a carbon atom concentration lower than that of the trench insulating film. The gate electrode is in contact with a portion of the trench insulating film on the side wall. Accordingly, a low threshold voltage and a large breakdown voltage can be attained.
1. A method for manufacturing a silicon carbide semiconductor device comprising the steps of:
preparing a silicon carbide substrate having a silicon carbide layer;
forming a trench at said silicon carbide layer;
forming a bottom insulating film at a bottom portion of said trench;
forming a trench insulating film under said bottom insulating film to cover said bottom portion and a side wall of said trench after forming said bottom insulating film;
forming a gate electrode on said bottom insulating film on said trench insulating film, and
wherein said trench insulating film is formed by thermally oxidizing said silicon carbide layer after forming said bottom insulating film.
2. The method for manufacturing a silicon carbide semiconductor device according to claim 1 , said silicon carbide layer having a first conductivity type and further comprising a step of:
forming an impurity region of a second conductivity type at said silicon carbide layer before forming said trench, wherein
said trench is formed to penetrate said impurity region.
3. The method for manufacturing a silicon carbide semiconductor device according to claim 1 , wherein
said trench insulating film is formed at a first temperature higher than a second temperature at which said bottom insulating film is formed.
4. The method for manufacturing a silicon carbide semiconductor device according to claim 3 , wherein
said first temperature is 1300° C. or more and said second temperature is not less than 800° C. and not more than 950° C.
5. The method for manufacturing a silicon carbide semiconductor device according to claim 1 , further comprising a step of:
forming a silicon film on said bottom portion of said trench before forming said bottom insulating film, wherein
said bottom insulating film is formed by thermally oxidizing said silicon film.