IP Library Granted Patent US 9,695,049
Granted Patent B2
US 9,695,049 · App. 15/125,132 · Granted Jul 4, 2017

System and method for ultra high purity (UHP) carbon dioxide purification

Inventors: Marco Succi (Milan, IT); Cristian Landoni (Novara, IT); Sarah Vogt (Grover Beach, CA); Charles H. Applegarth (San Luis Obispo, CA)
Assignee: SAES GETTERS S.P.A.
C01B31/20B01D53/00B01D53/864B01J23/44B01J23/755B01J35/0006B01D2255/1023B01D2255/20753B01D2256/22B01D2257/7025Y02C20/20
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Quick Facts
Patent No.
US 9,695,049
App. No.
15/125,132
Granted
Jul 4, 2017
Kind
B2
Abstract

An Ultra High Purity (UHP) carbon dioxide purification system and a method for purification of UHP carbon dioxide is disclosed. The purification system includes supported nickel oxide and supported palladium oxide. An upper portion of the purification system is at least partially filled with supported nickel oxide, and a lower portion of the purification system is at least partially filled with supported palladium oxide. The upper and lower portions of the purification system have a physical separation but are in fluid communication. The method includes purification or pre-purification of High Purity (HP) carbon dioxide to Ultra High Purity (UHP) levels including feeding carbon dioxide of High Purity grade or better to an Ultra High Purity carbon dioxide purification system.

Claims (21)

1. An Ultra High Purity (UHP) carbon dioxide purification system having an inlet and an outlet, wherein its upper portion proximate to said inlet is at least partially filled with supported nickel oxide and its lower portion proximate to said outlet is at least partially filled with supported palladium oxide, and wherein said upper and lower portions of the purification system have a physical separation but are in fluid communication.

2. The Ultra High Purity carbon dioxide purification system according to claim 1 , wherein said physical separation and fluid communication is achieved by means of one or more of a metallic mesh, a porous septum, a screen grid, a particle filter or a perforated metallic sheet interposed between said upper portion and said lower portion.

3. The Ultra High Purity carbon dioxide purification system according to claim 1 , wherein said physical separation and fluid communication is achieved by means of a first vessel at least partially filled with supported nickel oxide and having an inlet and an outlet, which outlet is in communication with an inlet of a second vessel that is at least partially filled with supported palladium oxide.

4. The Ultra High Purity carbon dioxide purification system according to claim 3 , wherein said outlet of the first vessel is directly connected to said inlet of the second vessel, said direct connection preferably including one or more shut-off valves placed between the vessels.

5. The Ultra High Purity carbon dioxide purification system according to claim 1 , wherein the weight ratio of the supported nickel oxide to the supported palladium oxide is comprised between 10 and 0.1, preferably between 5 and 0.2.

6. The Ultra High Purity carbon dioxide purification system according to claim 1 , wherein at least 20% of the upper portion volume is filled with supported nickel oxide and at least 20% of the lower portion volume is filled with supported palladium oxide.

7. The Ultra High Purity carbon dioxide purification system according to claim 1 , wherein said system is equipped with at least one heater and one temperature detecting device.

8. The Ultra High Purity carbon dioxide purification system according to claim 3 , wherein said first vessel and said second vessel are each equipped with a heater and one or more temperature detecting devices.

9. The Ultra High Purity carbon dioxide purification system according to claim 1 , further comprising an oxygen addition inlet.

10. The Ultra High Purity carbon dioxide purification system according to claim 1 , further comprising a sampling port.

11. The Ultra High Purity carbon dioxide purification system according to claim 3 , wherein said sampling port is positioned between the inlet of the first vessel and the inlet of the second vessel.

12. The Ultra High Purity carbon dioxide purification system according to claim 11 , wherein said sampling port is positioned in the lowest portion of the first vessel.

13. The Ultra High Purity carbon dioxide purification system according to claim 11 , wherein said sampling port is positioned between the outlet of the first vessel and the inlet of the second vessel.

14. A method for the purification or pre-purification of High Purity (HP) carbon dioxide to Ultra High Purity (UHP) levels, comprising:

feeding carbon dioxide of High Purity grade or better to an Ultra High Purity carbon dioxide purification system made according to claim 1 .

15. The method according to claim 14 , wherein up to 50 ppm of oxygen are added to the incoming High Purity carbon dioxide gaseous stream.

16. The method according to claim 15 , wherein said added oxygen is comprised between 2 and 50 times the nominal inlet methane concentration.

17. The method according to claim 14 , wherein said purification system is heated at a temperature comprised between 150° C. and 400° C., preferably comprised between 275° C. and 350° C.

18. The method according to claim 17 , wherein in case said purification system includes a first vessel at least partially filled with supported nickel oxide and a second vessel at least partially filled with supported palladium oxide, said first vessel is heated at temperature comprised between 150° C. and 400° C., more preferably comprised between 200° C. and 350° C., and said second vessel is heated at a temperature comprised between 250° C. and 400° C., more preferably comprised between 275° C. and 350° C.

19. The method according to claim 14 , wherein the gas in the purification system is sampled and analysed for the level of sulphur compounds.

20. The method according to claim 19 , wherein in case said purification system includes a first vessel at least partially filled with supported nickel oxide and a second vessel at least partially filled with supported palladium oxide, said first vessel is replaced with a new one containing fresh supported nickel oxide when said level of sulphur compounds is equal to or higher than a threshold, said threshold being preferably comprised between 10 and 50 ppb.

Assignments (7)
SECURITY INTEREST Recorded Jul 8, 2022
From: ENTEGRIS, INC.; ENTEGRIS GP, INC.; POCO GRAPHITE, INC.; CMC MATERIALS, INC.; INTERNATIONAL TEST SOLUTIONS, LLC; QED TECHNOLOGIES INTERNATIONAL, INC.
To: TRUIST BANK, AS NOTES COLLATERAL AGENT
Reel/Frame 060613/0072 →
ASSIGNMENT OF PATENT SECURITY INTEREST RECORDED AT REEL/FRAME 048811/0679 Recorded Nov 5, 2019
From: GOLDMAN SACHS BANK USA
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 050965/0035 →
CHANGE OF NAME Recorded Oct 7, 2019
From: SAES PURE GAS, INC.
To: ENTEGRIS GP, INC.
Reel/Frame 050647/0398 →
CORRECTIVE ASSIGNMENT TO CORRECT THE SIGNATURE OF THE PRESIDENT OF SAES GETTERS S.P.A. HAS BEEN UPDATED PREVIOUSLY RECORDED ON REEL 045813 FRAME 0862. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Recorded Feb 5, 2019
From: SAES GETTERS S.P.A.
To: SAES PURE GAS, INC.
Reel/Frame 048245/0878 →
SECURITY INTEREST Recorded Nov 13, 2018
From: ENTEGRIS, INC.; SAES PURE GAS, INC.
To: GOLDMAN SACHS BANK USA
Reel/Frame 048811/0679 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 15, 2018
From: SAES GETTERS S.P.A.
To: SAES PURE GAS, INC.
Reel/Frame 045813/0862 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 13, 2016
From: SUCCI, MARCO; LANDONI, CRISTIAN; VOGT, SARAH; APPLEGARTH, CHARLES H.
To: SAES GETTERS S.P.A.
Reel/Frame 039718/0869 →
Priority Claims (1)
IT MI2014A0415 · Mar 14, 2014 · national
Continuity (1)
Related Publication 20170044019A1 · Feb 16, 2017