Polishing apparatus
A polishing apparatus has a polishing pad, a top ring for holding a semiconductor wafer, and a vertical movement mechanism operable to move the top ring in a vertical direction. The polishing apparatus also has a distance measuring sensor operable to detect a position of the top ring when a lower surface of the top ring is brought into contact with the polishing pad, and a controller operable to calculate an optimal position of the top ring to polish the semiconductor wafer based on the position detected by the distance measuring sensor. The vertical movement mechanism includes a ball screw mechanism operable to move the top ring to the optimal position.
1. A polishing apparatus for polishing a substrate while pressing the substrate against a polishing surface, said polishing apparatus comprising:
a top ring body configured to press the substrate against said polishing surface; and
a retainer ring assembly configured to press said polishing surface, said retainer ring assembly being provided at a peripheral portion of said top ring body,
wherein said retainer ring assembly includes:
a rolling diaphragm having a pressure chamber formed therein;
a passage for supplying a fluid to the pressure chamber to vertically expand or contract said rolling diaphragm;
a piston connected to said rolling diaphragm;
a ring member connected to said piston, said ring member being vertically movable according to an operation of said rolling diaphragm, said ring member being brought into contact with said polishing surface;
a cylinder housing said rolling diaphragm therein; and
a connection sheet capable of being expanded and contracted in a vertical direction, said connection sheet being connected to an outer periphery of both said cylinder and said ring member so as to cover an outer peripheral gap between said cylinder and said ring member.
2. The polishing apparatus according to claim 1 , wherein said connection sheet is arranged around said ring member.
3. The polishing apparatus according to claim 1 , wherein said piston is located between said rolling diaphragm and said ring member.
4. The polishing apparatus according to claim 1 , wherein said connection sheet has a bellows structure.