IP Library Granted Patent US 9,728,734
Granted Patent B2
US 9,728,734 · App. 15/154,170 · Granted Aug 8, 2017

Aligned carbon nanotubes for use in high performance field effect transistors

Inventors: Michael Scott Arnold (Middletown, WI); Padma Gopalan (Madison, WI); Gerald Joseph Brady (Madison, WI); Yongho Joo (Madison, WI)
Assignee: Wisconsin Alumni Research Foundation
H01L51/0558C01B31/0246H01L51/0003H01L51/0048H01L51/0512
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 9,728,734
App. No.
15/154,170
Granted
Aug 8, 2017
Kind
B2
Abstract

High density films of semiconducting single-walled carbon nanotubes having a high degree of nanotube alignment are provided. Also provided are methods of making the films and field effect transistors (FETs) that incorporate the films as conducting channel materials. The single-walled carbon nanotubes are deposited from a thin layer of organic solvent containing solubilized single-walled carbon nanotubes that is spread over the surface of an aqueous medium, inducing evaporative self-assembly upon contacting a solid substrate.

Claims (32)

1. A field effect transistor comprising:

a source electrode;

a drain electrode;

a gate electrode;

a conducting channel in electrical contact with the source electrode and the drain electrode, the conducting channel comprising a film comprising aligned s-SWCNTs; and

a gate dielectric disposed between the gate electrode and the conducting channel,

wherein the field effect transistor has a channel length of up to about 9 μm and an on-conductance per width of at least 5 μS μm −1 and an on/off ratio per width of at least 1×10 5 .

2. The transistor of claim 1 having an on-conductance per width of at least 7 μS μm −1 and an on/off ratio per width of at least 1.5×10 5 .

3. The transistor of claim 1 having an on-conductance per width of at least 10 μS μm −1 and an on/off ratio per width of at least 2×10 5 .

4. The transistor of claim 1 , wherein the single-walled carbon nanotube linear packing density in the film is at least 40 single-walled carbon nanotubes/μm.

5. The transistor of claim 1 , wherein the single-walled carbon nanotube linear packing density in the film is at least 50 single-walled carbon nanotubes/μm.

6. The transistor of claim 1 , wherein the film has a semiconducting single-walled carbon nanotube purity level of at least 99.9%.

7. The transistor of claim 1 , wherein the s-SWCNTs are wrapped in a semiconductor-selective polymer.

8. The transistor of claim 1 , wherein the single-walled carbon nanotube linear packing density in the film is at least 50 single-walled carbon nanotubes/μm, the film has a semiconducting single-walled carbon nanotube purity level of at least 99%, the transistor has a channel length in the range from 400 nm to 4 μm, and the transistor has an on-conductance per width of at least 10 μS μm −1 and an on/off ratio per width of at least 1×10 5 .

9. The transistor of claim 1 , wherein the single-walled carbon nanotube linear packing density in the film is at least 50 single-walled carbon nanotubes/μm, the film has a semiconducting single-walled carbon nanotube purity level of at least 99%, the transistor has a channel length of no greater than 400 nm, and the transistor has an on-conductance per width of at least 20 μS μm −1 and an on/off ratio per width of at least 1×10 5 .

10. The transistor of claim 1 , wherein the thickness of the film corresponds to no more than a bilayer of the s-SWCNTs.

11. A field effect transistor comprising:

a source electrode;

a drain electrode;

a gate electrode;

a conducting channel in electrical contact with the source electrode and the drain electrode, the conducting channel comprising a film comprising aligned s-SWCNTs; and

a gate dielectric disposed between the gate electrode and the conducting channel,

wherein the field effect transistor has a channel length of at least 9 μm and an on-conductance per width of at least 5 μS μm −1 and an on/off ratio per width of at least 1×10 6 .

12. The transistor of claim 11 , wherein the single-walled carbon nanotube linear packing density in the film is at least 40 single-walled carbon nanotubes/μm.

13. The transistor of claim 11 , wherein the single-walled carbon nanotube linear packing density in the film is at least 50 single-walled carbon nanotubes/μm.

14. The transistor of claim 13 , wherein the film has a semiconducting single-walled carbon nanotube purity level of at least 99.9%.

15. The transistor of claim 11 , wherein the film has a semiconducting single-walled carbon nanotube purity level of at least 99.9%.

16. The transistor of claim 1 , wherein the s-SWCNTs are wrapped in a semiconductor-selective polymer.

17. The transistor of claim 1 , wherein the source electrode and the drain electrode are metal electrodes.

18. The transistor of claim 11 , wherein the source electrode and the drain electrode are metal electrodes.

19. The transistor of claim 9 , wherein the transistor has an on-conductance per width of at least 60 μS μm −1 and an on/off ratio per width of at least 2×10 5 .

20. The transistor of claim 11 , wherein the transistor has an on-conductance per width of at least 7 μS μm −1 and an on/off ratio per width of at least 2×10 6 .

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 14, 2017
From: ARNOLD, MICHAEL; GOPALAN, PADMA; BRADY, GERALD; JOO, YONGHO
To: WISCONSIN ALUMNI RESEARCH FOUNDATION
Reel/Frame 041569/0815 →
CONFIRMATORY LICENSE Recorded May 26, 2016
From: UNIVERSITY OF WISCONSIN, MADISON
To: NATIONAL SCIENCE FOUNDATION
Reel/Frame 038818/0635 →
Continuity (2)
Division 14177828 · Feb 11, 2014
Related Publication 20160254468A1 · Sep 1, 2016