IP Library Granted Patent US 9,735,301
Granted Patent B2
US 9,735,301 · App. 14/081,641 · Granted Aug 15, 2017

Manufacture of N-type chalcogenide compositions and their uses in photovoltaic devices

Inventors: Todd R. Bryden (Midland, MI); Buford I. Lemon (Willow Grove, PA); Joseph George (Midland, MI); Rebekah Kristine Ligman Feist (Midland, MI)
Assignee: DOW GLOBAL TECHNOLOGIES LLC
H01L31/0749C23C14/0623H01L21/02565H01L21/02568H01L21/02576H01L31/0296H01L31/02963H01L31/0322H01L31/0323H01L31/03925H01L31/03928H01L31/18H01L31/1828Y02E10/50Y02E10/541Y02E10/543
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Quick Facts
Patent No.
US 9,735,301
App. No.
14/081,641
Granted
Aug 15, 2017
Kind
B2
Abstract

A layer of an n-type chalcogenide compositions provided on a substrate in the presence of an oxidizing gas in an amount sufficient to provide a resistivity to the layer that is less than the resistivity a layer deposited under identical conditions but in the substantial absence of oxygen.

Claims (18)

1. A photovoltaic article comprising:

a substrate having a p-type absorber comprising a p-type photovoltaic composition, said p-type photovoltaic composition comprising a p-type chalcogenide comprising (i) one or more of copper, indium, and gallium; and (ii) at least one of sulfur and selenium; and

a layer of an n-type chalcogenide composition on the p-type absorber, wherein the n-type chalcogenide composition comprises at least one sulfide and/or at least one selenide that incorporates at least cadmium, and wherein the n-type chalcogenide composition is formed at a temperature in the range from 20° C. to 30° C. in an oxidizing atmosphere comprising an oxidizing gas and at least one other gas, wherein the oxidizing atmosphere has a pressure less than about 100 mTorr, and wherein the oxidizing gas is present in the oxidizing atmosphere in an amount such that the oxidizing gas comprises from about 0.001 mole % to about 0.7 mole % of the oxidizing atmosphere, and wherein the composition of the n-type chalcogenide composition formed has a resistivity less than the resistivity of an n-type chalcogenide composition formed in an otherwise identical process but in the substantial absence of the oxidizing gas; and

wherein the n-type chalcogenide composition has a resistivity of less than about 1×10 5 ohm-cm.

2. The article of claim 1 , wherein the n-type chalcogenide further comprises one or more constituents selected from Zn, In, and combinations thereof.

3. The article of claim 1 wherein the oxidizing atmosphere comprises from about 0.05 mole % to about 0.7 mole % of the oxidizing gas at a pressure of less than about 100 mTorr.

4. The article of claim 1 , wherein the oxidizing atmosphere is at a pressure in the range of from about 5 to about 20 mTorr.

5. The article of claim 1 , wherein the oxidizing atmosphere comprises from about 0.05 mole % to about 0.3 mole % of the oxidizing gas.

6. The article of claim 1 , wherein the oxidizing atmosphere comprises from about 0.001 mole % to less than about 0.25 mole % of the oxidizing gas.

7. The article of claim 1 , wherein the partial pressure of the oxidizing gas in the oxidizing atmosphere is between about 0.005 to about 0.5 mTorr.

8. The article of claim 7 , wherein the partial pressure of the oxidizing gas in the oxidizing atmosphere is between about 0.005 to about 0.3 mTorr.

9. The article of claim 1 , wherein the oxidizing gas is selected from oxygen, water vapor, nitrous oxide, and ozone.

10. The article of claim 1 , wherein the at least one other gas is selected from nitrogen, a noble gas, and combinations thereof.

11. The article of claim 1 , wherein the oxidizing atmosphere comprises oxygen and a noble gas.

12. The article of claim 1 , wherein the n-type chalcogenide composition comprises cadmium and sulfur.

13. The article of claim 1 , wherein the n-type chalcogenide composition is in electrical contact with a surface of the p-type photovoltaic composition.

14. The article of claim 1 , wherein the n-type chalcogenide composition is formed by evaporation, sputtering, chemical vapor deposition, or atomic layer deposition.

15. The article of claim 1 , wherein the n-type chalcogenide composition is formed by sputtering.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 9, 2018
From: BRYDEN, TODD R.; FEIST, REBEKAH KRISTINE-LIGMAN; LEMON, BUFORD I.; GEORGE, JOSEPH
To: DOW GLOBAL TECHNOLOGIES INC.
Reel/Frame 045158/0441 →
CHANGE OF NAME Recorded Mar 9, 2018
From: DOW GLOBAL TECHNOLOGIES INC.
To: DOW GLOBAL TECHNOLOGIES LLC
Reel/Frame 045546/0079 →
Continuity (3)
Division 12912205 · Oct 26, 2010
Provisional Application 61258416 · Nov 5, 2009
Related Publication 20140070354A1 · Mar 13, 2014