Fabrication method of interconnect structure

1. A method for fabricating an interconnect structure, comprising:

providing a substrate with a surface;

forming a metal layer covering the surface of the substrate and with a desired grain size to reduce grain boundary scattering of the interconnect structure subsequently formed with the metal layer;

forming a first mask film on the metal layer;

forming a second mask film on the first mask film;

etching the metal layer to form a plurality of metal lines on the surface of the substrate and a plurality of metal pillars on each of the plurality of the metal lines of the interconnect structure, wherein the positions of the plurality of metal lines corresponds to the positions of the first mask film and positions of the plurality of metal pillars corresponds to the positions of the second mask film; and

forming a dielectric layer covering the surface of the substrate, surfaces of the metal lines, and side surfaces of the metal pillars.

2. The method according to claim 1 , wherein forming the plurality of the metal lines and the plurality of metal pillars further includes:

etching the metal layer to form an initial metal line on the surface of the substrate and a plurality of the initial metal pillars on the initial metal line; and

etching the initial metal line to form the plurality of the metal lines on the surface of the substrate and the plurality of metal pillars on each of the metal lines.

3. The method according to claim 2 , wherein forming the plurality of the metal lines and the plurality of metal pillars further includes:

etching portions of the metal layer exposed by the first mask film with a pre-determined depth using the first mask film as an etching mask to form the initial metal line on the surface of the substrate and the plurality of initial metal pillars on the initial metal line;

etching to remove portions of the first mask film exposed by the second mask film to form a first mask layer covering portions of surfaces of the initial meal pillars and a second mask layer on the first mask layer; and

etching the initial metal lines using the second mask layer as an etching mask until the surface of the substrate is exposed and etching the initial metal pillars to form the plurality of the metal lines on the surface of the substrate and the plurality of the metal pillars on each of the metal lines, simultaneously.

4. The method according to claim 3 , wherein:

the metal layer, the first mask film and the initial metal lines are etched in a same reaction chamber.

5. The method according to claim 3 , wherein:

the first mask film and the second mask film are formed by patterning a same initial mask layer.

6. The method according to claim 5 , wherein:

the initial mask layer is one of a single layer structure and multiple layer structure made of one of photoresist, back antireflective material, organic spin-coating layer material and top antireflective material.

7. The method according to claim 3 , wherein:

a thickness of the metal pillar is equal to a difference between a thickness of the metal layer and a thickness of the initial metal pillars; and

a thickness of the metal lines is equal to the thickness of the initial metal pillars.

8. The method according to claim 3 , wherein:

the first mask film and the second mask film are made of a same material; and

a thickness of the second mask film is greater than a thickness of the first mask film.

9. The method according to claim 3 , wherein:

the first mask film is made of one or more of silicon nitride, silicon oxide, silicon carbide, silicon oxynitride, silicon nitrocarbide; and

the second mask film is made of one or more of silicon nitride, silicon oxide, silicon carbide, silicon oxynitride, silicon nitrocarbide.

10. The method according to claim 2 , wherein forming the plurality of the metal lines and the plurality of metal pillars further includes:

forming a second mask layer covering portions of the metal layer corresponding to position and structure of the subsequently formed metal pillars on the metal layer before etching the metal layer;

etching the metal layer with a pre-determined depth using the second mask layer as an etching mask to form the initial metal line covering the surface of the substrate and the plurality of the initial metal pillars on the initial metal lines;

removing the second mask layer;

forming a first mask layer covering portions of metal lines corresponding to position and structure of the subsequently formed metal lines on surface of the initial metal line and surfaces of the initial metal pillars; and

etching the initial metal line using the first mask layer as an etching mask until the surface of the substrate is exposed to form the plurality of metal lines on the surface of the substrate and the plurality of the metal pillars on each of the metal lines.

11. The method according to claim 1 , wherein forming the plurality of the metal lines and the plurality of metal pillars further includes:

etching the metal layer to form a plurality of initial metal lines on the surface of the substrate; and

etching the initial metal lines to form the plurality of metal lines on the surface of the substrate and the plurality of the metal pillars on etch of the metal lines.

12. The method according to claim 11 , wherein forming the plurality of the metal lines and the plurality of metal pillars further includes:

etching portions of the metal layer exposed by the first mask film until the surface of the substrate is exposed using the first mask film and the second mask film as an etching mask to formed a plurality of initial metal lines on the surface of the substrate;

etching portions of the first mask film exposed by the second mask film to form a first mask layer covering portions of the initial metal lines and a second mask layer on the first mask layer; and

etching the initial metal lines with a pre-determined depth using the second mask layer as an etching mask to form the plurality of metal lines on the surface of the substrate and the plurality of the metal pillars on each of the metal lines.

13. The method according to claim 12 , wherein:

the process for etching the metal layer, the process for etching the first mask film and the process for etching the initial metal lines are performed in a same reaction chamber.

14. The method according to claim 11 , wherein forming the plurality of the metal lines and the plurality of metal pillars further includes:

forming a first mask film covering portions of the surface of the metal layer corresponding to position and structure of the subsequently formed metal lines on the metal layer;

etching the metal layer until the surface of the substrate is exposed using the first mask film as an etching mask to form a plurality of initial metal lines;

forming a second mask film covering portions of the surface the initial metal lines corresponding to the subsequently formed metal pillars on the initial metal lines; and

etching the initial metal lines with a pre-determined depth using the second mask film as an etching mask to form the plurality of metal lines and the plurality of metal pillars on each of the metal lines.

15. The method according to claim 1 , wherein:

the metal layer is etched by a dry etching process; and

the etching gas includes H 2 .