Substrate processing apparatus and method of transferring a substrate
A substrate processing apparatus is described herein. The substrate processing apparatus comprises a transferring device including: a grasping section configured to grasp a substrate holder, a transferring section configured to transfer the substrate holder grasped by the grasping section, and a processing bath for storing a substrate held by the substrate holder so that a surface of the substrate is vertically oriented. The grasping section is configured to grasp the substrate holder with a surface of the substrate oriented horizontally. The transferring section is configured to transfer the substrate holder above the processing bath, with the surface of the substrate oriented horizontally.
1. A substrate processing apparatus, comprising:
a transferring device including a grasping section configured to grasp a substrate holder, and a transferring section configured to transfer the substrate holder grasped by the grasping section; and
a processing bath for storing the substrate holder holding a substrate with a surface thereof oriented vertically, and processing the substrate,
wherein the grasping section is configured to rotate the substrate holder from a vertical position to a horizontal position upwardly away from the processing bath and grasp the substrate holder with the surface of the substrate oriented horizontally, and
the transferring section is configured to transfer the substrate holder above the processing bath, after the grasping section rotates the substrate holder, with the surface of the substrate oriented horizontally.
2. The substrate processing apparatus according to claim 1 , further comprising:
a lifter configured to support the substrate holder, and store the substrate holder into the processing bath or take out the substrate holder from the processing bath,
wherein the lifter comprises support portions configured to support the substrate holder from below, the support portions are movable between an upper position where the support portions receive the substrate holder from the transferring section and a lower position where the substrate holder is stored in the processing bath, and the support portions are operable at independent times from the transferring section.
3. The substrate processing apparatus according to claim 2 ,
wherein the transferring device comprises a drive mechanism configured to turn the grasping section grasping the substrate holder so that the surface of the substrate is vertically oriented, and
the lifter is configured to receive the substrate holder which is grasped with the surface of the substrate oriented vertically, from the transferring device.
4. The substrate processing apparatus according to claim 1 , further comprising:
a blowing mechanism configured to blow gas,
wherein the grasping section is configured to grasp the substrate holder with the surface of the substrate oriented horizontally and a processed surface of the substrate facing upward,
the blowing mechanism is disposed at a position higher than the substrate holder and above a path on which the substrate holder is transferred, and
the blowing mechanism is configured to blow gas toward the processed surface of the substrate grasped by the grasping section.
5. The substrate processing apparatus according to claim 1 ,
wherein the grasping section comprises a pressing member configured to press the substrate to the substrate holder.
6. A substrate processing apparatus, comprising:
a transferring device including a grasping section configured to grasp a substrate holder, and a transferring section configured to transfer the substrate holder grasped by the grasping section;
a processing bath for storing the substrate holder holding a substrate with a surface of the substrate oriented vertically, and processing the substrate;
a lifter configured to support the substrate holder, and store the substrate holder into the processing bath or take out the substrate holder from the treatment bath; and
a blowing mechanism configured to blow gas,
wherein the grasping section is configured to rotate the substrate holder from a vertical position to a horizontal position upwardly away from the processing bath and grasp the substrate holder with the surface of the substrate oriented horizontally and a processed surface of the substrate facing upward,
the transferring section is configured to transfer the substrate holder above the processing bath, after the grasping section rotates the substrate holder, with the surface of the substrate oriented horizontally,
the blowing mechanism is disposed at a position higher than the substrate holder and above a path on which the substrate holder is transferred, and
the blowing mechanism is configured to blow gas toward the processed surface of the substrate grasped by the grasping section.
7. The substrate processing apparatus according to claim 6 ,
wherein the transferring device comprises a drive mechanism configured to turn the grasping section grasping the substrate holder so that the surface of the substrate is vertically oriented, and
the lifter is configured to receive the substrate holder which is grasped with the surface of the substrate oriented vertically, from the transferring device,
wherein the lifter comprises support portions configured to support the substrate holder from below, the support portions are movable between an upper position where the support portions receive the substrate holder from the transferring section and a lower position where the substrate holder is stored in the processing bath, and the support portions are operable at independent times from the transferring section.
8. A substrate processing apparatus, comprising:
a transferring device including a grasping section configured to grasp a substrate holder, and a transferring section configured to transfer the substrate holder grasped by the grasping section;
a processing bath for storing the substrate holder holding a substrate with a surface of the substrate oriented vertically, and processing the substrate; and
a lifter configured to support the substrate holder, and store the substrate holder into the processing bath or take out the substrate holder from the processing bath,
wherein the grasping section is configured to rotate the substrate holder from a vertical position to a horizontal position upwardly away from the processing bath and grasp the substrate holder with the surface of the substrate oriented horizontally,
the transferring section is configured to transfer the substrate holder above the processing bath, after the grasping section rotates the substrate holder, with the surface of the substrate oriented horizontally, and
the grasping section comprises a pressing member configured to press the substrate to the substrate holder.
9. The substrate processing apparatus according to claim 8 ,
wherein the transferring device comprises a drive mechanism configured to turn the grasping section grasping the substrate holder so that the surface of the substrate is vertically oriented, and
the lifter is configured to receive the substrate holder which is grasped with the surface of the substrate oriented vertically, from the transferring device.
10. The substrate processing apparatus according to claim 8 , further comprising:
a blowing mechanism configured to blow gas,
wherein the grasping section is configured to grasp the substrate holder with the surface of the substrate oriented horizontally and a processed surface of the substrate facing upward, and
the blowing mechanism is configured to blow gas toward the processed surface of the substrate grasped by the grasping section.
11. The substrate processing apparatus according to claim 9 , further comprising:
a blowing mechanism configured to blow gas,
wherein the grasping section is configured to grasp the substrate holder with the surface of the substrate oriented horizontally and a processed surface of the substrate facing upward, and
the blowing mechanism is configured to blow gas toward the processed surface of the substrate grasped by the grasping section.
12. A substrate transfer method, comprising:
transferring a substrate holder holding a substrate above a processing bath, with a surface of the substrate oriented horizontally, with a transferring device including a grasping section configured to grasp a substrate holder, and a transferring section configured to transfer the substrate holder grasped by the grasping section;
turning the substrate holder with the grasping section so that the surface of the substrate is vertically oriented;
wherein the grasping section is configured to rotate the substrate holder from a vertical position to a horizontal position upwardly away from the processing bath and grasp the substrate holder with the surface of the substrate oriented horizontally; and
storing the substrate holder into the processing bath with the transferring device with the surface of the substrate oriented vertically;
transferring the substrate holder above the processing bath with the transferring section, after the grasping section rotates the substrate holder, with the surface of the substrate oriented horizontally.