IP Library › Granted Patent US 9,799,616
Granted Patent B2
US 9,799,616 · App. 15/389,540 · Granted Oct 24, 2017

Package substrate with double sided fine line RDL

Inventor: Dyi-Chung Hu (Hsinchu, TW)
H01L24/02H01L21/4846H01L23/498H01L23/49827H01L24/06H01L2224/0231H01L2224/02331H01L2224/02373H01L2224/0612
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Quick Facts
Patent No.
US 9,799,616
App. No.
15/389,540
Granted
Oct 24, 2017
Kind
B2
Abstract

A package substrate has a sandwiched redistribution layers is disclosed. A middle redistribution layer functions as a core redistribution layer sandwiched by a top redistribution layer and a bottom redistribution layer. A top surface of the top redistribution layer is made adaptive for at least one chip to mount, and a bottom surface of the bottom redistribution layer is made adaptive for at least one chip to mount. A line width of each circuit of the middle redistribution layer is wider than a circuit of either the top redistribution layer or the bottom redistribution layer.

Claims (23)

1. A package substrate with double sided fine line RDL, comprises:

a first redistribution layer, having a first circuitry embedded in a plurality of first dielectric layers; the first circuitry comprises a plurality of first upper metal pads configured on a top side of the first redistribution layer, and a plurality of first lower metal pads configured on a bottom side of the first redistribution layer; a density of the first lower metal pads is higher than a density of the first upper metal pads; a bottom side of the first lower metal pads is adaptive to mount at least one chip;

a second redistribution layer, configured on a top side of the first redistribution layer, having a second circuitry embedded in a plurality of second dielectric layers; the second circuitry comprises: a plurality of second upper metal pads configured on a top side of the second redistribution layer and a plurality of second lower metal pads configured on a bottom side of the second redistribution layer; the second circuitry is electrically coupled to the first circuitry through a plurality of first metal vias;

a third redistribution layer, configured on a top side of the second redistribution layer, having a third circuitry embedded in a plurality of third dielectric layers; the third circuitry is electrically coupled to the second circuitry through a plurality of second metal vias; the third circuitry comprises a plurality of third upper metal pads configured on a top side of the third redistribution layer, and a plurality of third lower metal pads configured on a bottom side of the third redistribution layer; a density of the third upper metal pads is higher than a density of the third lower metal pads; a top side of the third upper metal pads is adaptive to mount at least one chip; wherein

a line width of each circuit of the second circuitry is wider than a line width of each circuit of the first circuitry; and

a line width of each circuit of the second circuitry is wider than a line width of each circuit of the third circuitry.

2. A package substrate as claimed in claim 1 , wherein

each of the first upper metal pads is electrically coupled to a corresponding second lower metal pads through a corresponding bottom metal via; and

each of the third lower metal pads is electrically coupled to a corresponding second upper metal pads through a corresponding top metal via.

3. A package substrate as claimed in claim 2 , wherein

the second redistribution layer has an extended portion extending beyond a lateral side of one of the first redistribution layer and the third redistribution layer; and

at least one connection metal pad exposed on a top side of the extended portion of the second redistribution layer.

4. A package substrate as claimed in claim 3 , further comprises:

a flexible circuit board, having at least a metal pad adaptive to electrically couple to the at least one top metal pad exposed on the extended portion of the second redistribution layer.

5. A fabrication process for making a package substrate, comprises:

preparing a temporary carrier, with a release layer on a top surface of the temporary carrier; and with a base dielectric layer on a top surface of the release layer;

forming a first redistribution layer on a top surface of the base dielectric layer;

forming a second redistribution layer on a top surface of the first redistribution layer;

forming a third redistribution layer on a top surface of the second redistribution layer; wherein a line width of each circuit of the second circuitry is at least two times wider than a line width of each circuit of the first circuitry; and a line width of each circuit of the second circuitry is at least two times wider than a line width of each circuit of the third circuitry.

6. A fabrication process for making a package substrate as claimed in claim 5 , further comprises:

etching a portion of one of the first dielectric layer and the third dielectric layer from a lateral side to exposed a top surface of the second redistribution layer and expose at least one contact metal pad exposed on a top surface of the second redistribution layer.

7. A fabrication process for making a package substrate as claimed in claim 6 , further comprises:

preparing a flexible circuit board, the flexible circuit board comprising at least a metal pad adaptive to electrically couple to the at least one top metal pad exposed on the extended portion of the second redistribution layer.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 6, 2026
From: HU, DYI-CHUNG
To: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
Reel/Frame 075543/0215 →
Continuity (2)
Provisional Application 62305133 · Mar 8, 2016
Related Publication 20170263579A1 · Sep 14, 2017