Manufacturing method of the semiconductor device
View Patent ↗The semiconductor device is manufactured through the following steps: after first heat treatment is performed on an oxide semiconductor film, the oxide semiconductor film is processed to form an oxide semiconductor layer; immediately after that, side walls of the oxide semiconductor layer are covered with an insulating oxide; and in second heat treatment, the side surfaces of the oxide semiconductor layer are prevented from being exposed to a vacuum and defects (oxygen deficiency) in the oxide semiconductor layer are reduced.
1. A method for manufacturing a semiconductor device, comprising the steps of:
forming a source electrode and a drain electrode;
forming an oxide semiconductor film over and in contact with the source electrode and the drain electrode;
patterning the oxide semiconductor film to form an oxide semiconductor layer;
forming a second insulating film covering the oxide semiconductor layer;
forming a gate electrode over the oxide semiconductor layer;
forming a third insulating film covering the second insulating film; and
performing a second heat treatment to the oxide semiconductor layer after forming the third insulating film,
wherein a part of oxygen in the third insulating film is desorbed during the second heat treatment, and
wherein a part of the desorbed oxygen is supplied to the oxide semiconductor layer.
2. The method according to claim 1 , further comprising the steps of:
forming a first insulating film over a substrate, wherein the first insulating film is under the source electrode and the drain electrode; and
performing a first heat treatment to the oxide semiconductor film before the patterning the oxide semiconductor film.
3. The method according to claim 2 ,
wherein a part of oxygen in the first insulating film is desorbed during the first heat treatment, and
wherein a part of the desorbed oxygen is supplied to the oxide semiconductor film.
4. The method according to claim 2 , wherein the first insulating film is formed using an insulating oxide containing more oxygen than oxygen in a stoichiometric proportion.
5. The method according to claim 2 , wherein the first heat treatment is performed by a heat treatment on the substrate.
6. The method according to claim 2 , wherein a concentration of hydrogen in the oxide semiconductor film is lowered after performing the first heat treatment.
7. The method according to claim 1 , wherein each of the source electrode and the drain electrode is a metal film having a thickness ranging from 100 nm to 300 nm.
8. The method according to claim 1 , wherein the oxide semiconductor layer includes a region comprising c-axis-aligned crystalline oxide semiconductor that is a non-single-crystal oxide material.