IP Library Granted Patent US 9,837,381
Granted Patent B2
US 9,837,381 · App. 14/870,064 · Granted Dec 5, 2017

Method of forming a chip assembly with a die attach liquid

Inventor: Alexander Heinrich (Bad Abbach, DE)
Assignee: INFINEON TECHNOLOGIES AG
H01L25/0655H01L21/6835H01L23/13H01L23/4827H01L23/49503H01L23/49513H01L24/05H01L24/29H01L24/83H01L24/97H01L25/50H01L23/544H01L24/27H01L24/32H01L24/75H01L2221/68354H01L2223/54426H01L2223/54486H01L2224/04026H01L2224/05073H01L2224/05082H01L2224/05124H01L2224/05139H01L2224/05144H01L2224/05147H01L2224/05166H01L2224/05171H01L2224/05184H01L2224/05624H01L2224/05639H01L2224/05647H01L2224/05655H01L2224/05666H01L2224/05684H01L2224/05687H01L2224/06183H01L2224/26145H01L2224/26175H01L2224/27334H01L2224/27436H01L2224/291H01L2224/293H01L2224/2908H01L2224/2916H01L2224/2919H01L2224/29105H01L2224/29109H01L2224/29111H01L2224/29113H01L2224/29116H01L2224/29118H01L2224/29124H01L2224/29139H01L2224/29144H01L2224/29147H01L2224/29155H01L2224/29166H01L2224/29171H01L2224/29294H01L2224/29339H01L2224/29347H01L2224/32225H01L2224/32245H01L2224/32503H01L2224/7598H01L2224/75102H01L2224/75251H01L2224/75265H01L2224/75303H01L2224/75753H01L2224/83002H01L2224/83005H01L2224/83007H01L2224/8309H01L2224/83024H01L2224/8346H01L2224/83055H01L2224/83065H01L2224/83075H01L2224/8381H01L2224/8382H01L2224/8384H01L2224/83091H01L2224/83092H01L2224/83101H01L2224/83127H01L2224/83132H01L2224/83143H01L2224/83191H01L2224/83192H01L2224/83193H01L2224/83201H01L2224/83203H01L2224/83208H01L2224/83222H01L2224/83385H01L2224/83424H01L2224/83439H01L2224/83444H01L2224/83447H01L2224/83455H01L2224/83464H01L2224/83466H01L2224/83469H01L2224/83815H01L2224/83825H01L2224/83851H01L2224/83855H01L2224/83856H01L2224/83862H01L2224/83907H01L2224/83986H01L2224/97H01L2924/157H01L2924/1576H01L2924/1579H01L2924/15153H01L2924/15156H01L2924/15157H01L2924/15747H01L2924/15787H01L2924/15788
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Quick Facts
Patent No.
US 9,837,381
App. No.
14/870,064
Granted
Dec 5, 2017
Kind
B2
Abstract

A method of forming a chip assembly may include forming a plurality of cavities in a carrier; The method may further include arranging a die attach liquid in each of the cavities; arranging a plurality of chips on the die attach liquid, each chip comprising a rear side metallization and a rear side interconnect material disposed over the rear side metallization, wherein the rear side interconnect material faces the carrier; evaporating the die attach liquid; and after the evaporating the die attach liquid, fixing the plurality of chips to the carrier.

Claims (41)

1. A method of forming a chip assembly, the method comprising:

forming a plurality of cavities in a carrier;

arranging a die attach liquid in each of the cavities;

arranging a plurality of chips on the die attach liquid, each chip comprising a rear side metallization and a rear side interconnect material disposed over the rear side metallization, wherein the rear side interconnect material faces the carrier;

evaporating the die attach liquid; and

after the evaporating the die attach liquid, fixing the plurality of chips to the carrier.

2. The method of claim 1 , further comprising:

holding the plurality of chips, by a holding force, in respective positions in which they are arranged.

3. The method of claim 2 ,

wherein the holding force is provided by the die attach liquid.

4. The method of claim 1 ,

wherein the evaporating of the die attach liquid comprises heating the chip assembly.

5. The method of claim 1 ,

wherein the die attach liquid evaporates essentially completely.

6. The method of claim 1 ,

wherein the die attach liquid comprises an organofluorine compound.

7. The method of claim 1 ,

wherein the die attach liquid comprises a hydrofluoroether.

8. The method of claim 1 ,

wherein the die attach liquid comprises an alcohol or secondary alcohol.

9. The method of claim 1 ,

wherein the fixing the plurality of chips to the carrier comprises heating the chip assembly.

10. The method of claim 1 ,

wherein the fixing the plurality of chips to the carrier comprises diffusion soldering.

11. The method of claim 1 ,

wherein the fixing the plurality of chips to the carrier comprises pressing the plurality of chips onto the carrier until the plurality of chips is flush with a top side of the carrier outside the cavities.

12. The method of claim 1 ,

wherein the forming the plurality of cavities in the carrier comprises forming the plurality of cavities with side walls inclined away from the cavity in a direction from a bottom of the cavity to a top of the cavity.

13. The method of claim 1 , further comprising:

forming a rear side interconnect material repellent coating on at least one of: side walls of the plurality of cavities and side walls of the plurality of chips.

14. The method of claim 1 , further comprising:

forming a barrier coating for the rear side interconnect material on at least one of: side walls of the plurality of cavities and/or the side walls of the plurality of chips.

15. The method of claim 1 , further comprising:

forming a metallic coating for improved wetting or intermetallic formation on the bottom or on at least one of the side walls of the cavities.

16. A method of forming a chip assembly, the method comprising:

forming a plurality of cavities in a carrier;

disposing a carrier interconnect material over a bottom of each of the cavities;

arranging a die attach liquid in each of the cavities;

arranging a plurality of chips on the die attach liquid, each chip comprising a rear side metallization;

evaporating the die attach liquid; and

after the evaporating the die attach liquid, fixing the plurality of chips to the carrier.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 9, 2015
From: HEINRICH, ALEXANDER
To: INFINEON TECHNOLOGIES AG
Reel/Frame 036985/0791 →
Priority Claims (1)
DE 10 2014 114 982 · Oct 15, 2014 · national
Continuity (1)
Related Publication 20160111395A1 · Apr 21, 2016