Phase change memory element
A phase-change memory element is provided. The phase-change memory element may include an electrode; a phase-change material that contacts the electrode; a first conductor that contacts the phase-change material; and a second conductor that contacts the phase-change material. The second conductor may be electrically connected to the first conductor only through the phase-change material, and each of the first and second conductors may be electrically connected to the electrode only through the phase-change material.
1. A phase-change memory, comprising:
an electrode;
a phase-change material that contacts the electrode;
a first conductor that contacts the phase-change material; and
a second conductor that contacts the phase-change material;
wherein the second conductor is electrically connected to the first conductor only through the phase-change material, and wherein each of the first and second conductors is electrically connected to the electrode only through the phase-change material.
2. The phase-change memory of claim 1 , wherein a memory cell corresponding to one of the conductors comprises a multi-level memory cell.
3. The phase-change memory of claim 1 , wherein the phase change material comprises In, Ge, Sb, Te, Ga, Sn, or combinations thereof.
4. The phase-change memory of claim 1 , wherein the electrode comprises Al, W, Mo, Ti, TiN, TiAlN, TiW, or TaN.
5. The phase-change memory of claim 1 , wherein the conductors comprise Al, W, Mo, Ti, TiN, TiAlN, TiW, or TaN.
6. The phase-change memory of claim 1 , further comprising:
a substrate below the electrode; and
a transistor formed on a surface of the substrate, wherein a source or a drain of the transistor is electrically connected to the electrode.
7. The phase-change memory of claim 6 , wherein at least a portion of the transistor is located below the surface of the substrate.
8. The phase-change memory of claim 1 , further comprising:
a substrate below the electrode; and
a diode formed on a surface of the substrate, wherein a terminal of the diode is electrically connected to the electrode.
9. The phase-change memory of claim 1 , further comprising:
a substrate below the electrode; and
a complementary metal oxide semiconductor (CMOS) circuit formed on a surface of the substrate, wherein a terminal of the CMOS circuit is electrically connected to the electrode.
10. The phase-change memory of claim 1 , wherein the electrode is electrically connected to a bit line via a metal plug.
11. A phase-change memory, comprising:
a plurality of electrodes;
a phase-change material that contacts the plurality of electrodes;
at least one first conductor that contacts the phase-change material; and
at least one second conductor that contacts the phase-change material;
wherein the at least one second conductor is electrically connected to the at least one first conductor only through the phase-change material, and wherein the at least one first conductor and the at least one second conductor are electrically connected to the plurality of electrodes only through the phase-change material.
12. The phase-change memory of claim 11 , wherein the plurality of electrodes are coplanar and formed on a substrate.
13. The phase-change memory of claim 11 , wherein the plurality of electrodes are formed on a dielectric layer that is formed on a substrate.
14. The phase-change memory of claim 11 , further comprising a dielectric layer formed on sidewalls of each electrode of the plurality of electrodes.
15. The phase-change memory of claim 11 , wherein the at least one first conductor comprises a plurality of first conductors and the at least one second conductor comprises a plurality of second conductors.
16. The phase-change memory of claim 15 , wherein each first conductor of the plurality of first conductors comprises a plurality of first metal spacers and each second conductor of the plurality of second conductors comprises a plurality of second metal spacers.
17. The phase-change memory of claim 11 , wherein a first electrode of the plurality of electrodes is formed above a second electrode of the plurality of electrodes.
18. The phase-change memory of claim 17 , wherein the at least one first conductor is formed above the at least one second conductor.
19. The phase-change memory of claim 11 , wherein the phase change material comprises In, Ge, Sb, Te, Ga, Sn, or combinations thereof.
20. The phase-change memory of claim 11 , wherein the plurality of electrodes comprises Al, W, Mo, Ti, TiN, TiAlN, TiW, or TaN.