IP Library › Granted Patent US 9,853,010
Granted Patent B2
US 9,853,010 · App. 14/958,341 · Granted Dec 26, 2017

Method of fabricating a semiconductor package

Inventors: Kwang-Seong Choi (Daejeon, KR); Hyun-cheol Bae (Daejeon, KR); Yong Sung Eom (Daejeon, KR); Jin Ho Lee (Daejeon, KR); Haksun Lee (Daejeon, KR)
Assignee: ELECTGRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
H01L24/81H01L21/4853H01L21/563H01L25/50H01L2224/81091H01L2224/81224
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 9,853,010
App. No.
14/958,341
Granted
Dec 26, 2017
Kind
B2
Abstract

Provided is a method of fabricating a semiconductor package. The method includes providing a package substrate including a pad, mounting a semiconductor chip with a solder ball on the package substrate to allow the solder ball to be disposed on the pad, filling a space between the package substrate and the semiconductor chip with a underfill resin including a reducing agent comprising a carboxyl group, and irradiating the semiconductor chip with a laser to bond the solder ball to the pad, wherein the bonding of the solder ball to the pad comprises changing a metal oxide layer formed on surfaces of the pad and the solder ball to a metal layer by heat generated by the laser.

Claims (35)

1. A method of fabricating a semiconductor package, the method comprising:

providing a package substrate including a pad;

mounting a semiconductor chip with a solder ball on the package substrate to allow the solder ball to be disposed on the pad;

filling a space between the package substrate and the semiconductor chip with an underfill resin, the underfill resin including a reducing agent comprising a carboxyl group; and

irradiating the semiconductor chip with a laser to heat the semiconductor chip, heat of the semiconductor chip being transferred to the solder ball and the pad to thereby bond the solder ball to the pad and to cure the underfill resin,

wherein the bonding of the solder ball to the pad comprises changing a metal oxide layer formed on surfaces of the pad and the solder ball to a metal layer due to heat generated by the laser.

2. The method of claim 1 , wherein the reducing agent is glutaric acid, malic acid, azelaic acid, abietic acid, adipic acid, ascorbic acid, acrylic acid or citric acid.

3. The method of claim 1 , wherein the underfill resin further comprises a thermosetting resin and a hardener.

4. The method of claim 1 , wherein the heat generated by the laser has a temperature of about 130° C. to about 270° C.

5. The method of claim 1 , wherein the bonding of the solder ball to the pad further comprising applying pressure to the semiconductor chip.

6. The method of claim 1 , wherein the laser is irradiated to upper and/or lower portions of the semiconductor chip.

7. The method of claim 1 , wherein the laser has a wavelength of about 500 nm to about 2μm.

8. The method of claim 1 , further comprising, after the bonding of the solder ball to the pad,

forming another underfill resin on the semiconductor chip to cover a chip pad disposed on an upper surface of the semiconductor chip;

mounting another semiconductor chip with another solder ball on the semiconductor chip to allow the another solder ball to be disposed on the chip pad; and

bonding the another solder ball to the chip pad by using heat generated by a laser irradiated to the another semiconductor chip.

9. A method of fabricating a semiconductor package, the method comprising:

providing a package substrate including a pad;

mounting a semiconductor chip with a solder ball on the package substrate to allow the solder ball to be disposed on the pad;

filling a space between the package substrate and the semiconductor chip with an underfill resin, the underfill resin including a reducing agent comprising a carboxyl group;

irradiating the semiconductor chip with a laser to bond the solder ball to the pad, the bonding of the solder ball to the pad including changing a metal oxide layer formed on surfaces of the pad and the solder ball to a metal layer due to heat generated by the laser; and

after the bonding of the solder ball to the pad,

forming another underfill resin on the semiconductor chip to cover a chip pad disposed on an upper surface of the semiconductor chip;

mounting another semiconductor chip with another solder ball on the semiconductor chip;

applying heat to the package substrate to decrease viscosity of the another underfill resin and aligning the another semiconductor chip with the semiconductor chip to allow the another solder ball to be disposed on the chip pad; and

bonding the another solder ball to the chip pad by using heat generated by laser irradiated to the another semiconductor chip.

10. The method of claim 9 , wherein the bonding of the another solder ball to the chip pad comprises increasing the decreased viscosity of the another underfill resin.

11. The method of claim 9 , wherein the heat applied to the package substrate has a temperature of about 50° C. to about 180° C., and

the heat generated by the laser has a temperature of about 130° C. to about 270° C.

12. The method of claim 1 , further comprising, before the bonding of the solder ball to the pad, providing a laser reflecting layer on an upper surface of the semiconductor chip.

13. The method of claim 12 , wherein the laser reflecting layer comprises a metal material.

14. The method of claim 1 , further comprising, before the bonding of the solder ball to the pad,

forming a bonding layer on an upper surface of the semiconductor chip; and

forming an absorbing layer on the bonding layer.

15. The method of claim 1 , wherein the changing of the metal oxide layer to the metal layer comprises oxidizing the reducing agent by the heat to reduce the metal oxide layer.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 3, 2015
From: CHOI, KWANG-SEONG; BAE, HYUN-CHEOL; EOM, YONG SUNG; LEE, JIN HO; LEE, HAKSUN
To: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
Reel/Frame 037203/0447 →
Priority Claims (1)
KR 10-2015-0161193 · Nov 17, 2015 · national
Continuity (1)
Related Publication 20170141071A1 · May 18, 2017