Vapor phase growth method of growing a film on a substrate while heating the substrate with a heating unit
A vapor phase growth method of growing a film on a substrate by supplying material gases to the substrate while heating the substrate with a heating unit according to an embodiment, the method includes: measuring a temperature of the substrate with a radiation thermometer; executing a temperature feedback control to control an output of the heating unit to cause a measurement value of the radiation thermometer to have a set value when a film is not grown on the substrate; and executing a constant output control to maintain an output of the heating unit constant when a film causing thin-film interference in a wavelength measured by the radiation thermometer is grown on the substrate.
1. A vapor phase growth method of growing a film on a substrate by supplying material gases to the substrate while heating the substrate with a heating unit, the method comprising:
measuring a temperature of the substrate with a radiation thermometer;
executing a first temperature feedback control to control an output of the heating unit, so that a measurement value of the radiation thermometer has a first set value which is a growth temperature of a first film, in a condition that a film is not grown on the substrate, the first film causing thin-film interference and being grown on the substrate;
executing a first constant output control to maintain an output of the heating unit constant based on a first output of the heating unit controlled so that the measurement value is the first set value by the first temperature feedback control while a first film is grown on the substrate during the first constant output control; and
calculating a third set value by adding a difference between the first set value and a second set value to a measurement value of the radiation thermometer after growth of the first film, the second set value being a growth temperature of a second film which causes thin-film interference at the measuring wavelength of the radiation thermometer and being grown on the first film;
executing a second temperature feedback control, so that a measurement value of the radiation thermometer has the third set value, in a condition that a film is not grown on the substrate;
growing the second film on the first film while executing a second constant output control maintaining an output of the heating unit based on a second output of the heating unit controlled so that the measurement value is the second set value by the second temperature feedback control.
2. The method of claim 1 , further comprising:
calculating a first output average value, the first output average value being an average value of the output of the heating unit during a predetermined period when the first temperature feedback control is executed; and
maintaining an output of the heating unit at the first output average value when the first constant output control is executed.
3. The method of claim 1 , comprising executing the first temperature feedback control at a time when a pressure in a reaction chamber in which a vapor phase growth reaction is performed is changed, at a time when gases to be supplied into the reaction chamber are switched over, at a time when a flow rate of a gas supplied into the reaction chamber is changed, or at a time when a rotation speed of the substrate is changed.
4. The method of claim 1 , wherein
the first film is an aluminum nitride film, an aluminum gallium nitride film, or a gallium nitride film.
5. The method of claim 1 , wherein
the first film is an aluminum nitride film or an aluminum gallium nitride film, and the second film is a gallium nitride film.