Cleaning of chamber components with solid carbon dioxide particles

1. A method for cleaning a ceramic article, the ceramic article comprising one or more plasma-contacting surfaces and one or more non-plasma-contacting surfaces, wherein, during use of the ceramic article, a plasma contacts the one or more plasma-contacting surfaces without contacting the one or more non-plasma-contacting surfaces, and wherein the method comprises:

flowing liquid CO 2 into a spray nozzle;

directing a first stream of solid CO 2 particles from the spray nozzle toward the ceramic article for a first time duration to clean the ceramic article, wherein the liquid CO 2 is converted into the first stream of solid CO 2 particles upon exiting the spray nozzle, wherein the one or more plasma-contacting surfaces are contacted by the first stream of solid CO 2 particles after the one or more non-plasma-contacting surfaces are contacted by the first stream of solid CO 2 particles to reduce particle defects on the one or more plasma-contacting surfaces, and wherein the first time duration is sufficient for the first stream of solid CO 2 particles to cause a first layer of solid CO 2 to be formed on the ceramic article; and

after the first layer of solid CO 2 has sublimated, directing a second stream of solid CO 2 particles from the spray nozzle toward the ceramic article for at least one of the first time duration or a second time duration to further clean the ceramic article.

2. The method of claim 1 , wherein the second stream of solid CO 2 particles causes a second layer of solid CO 2 to be formed on the ceramic article, the method further comprising:

contacting the article with a cleaning solution after the second layer of solid CO 2 has sublimated.

3. The method of claim 1 , wherein at least one of the first time duration or the second time duration is between about 2 minutes and about 10 minutes.

4. The method of claim 1 , wherein the spray nozzle is maintained at an angle ranging from 15° to 45° with respect to a surface of the ceramic article.

5. The method of claim 1 , wherein the spray nozzle is maintained at an angle of approximately 30° with respect to a surface of the ceramic article.

6. The method of claim 1 , wherein directing the first stream of solid CO 2 particles from the spray nozzle toward the ceramic article comprises:

directing the first stream of solid CO 2 particles toward a top non-plasma-contacting surface of the ceramic article;

subsequently directing the first stream of solid CO 2 particles toward a side non-plasma-contacting surface of the ceramic article; and

subsequently directing the first stream of solid CO 2 particles toward the one or more plasma-contacting surfaces of the ceramic article.

7. The method of claim 1 , wherein the ceramic article is a nozzle, and wherein the one or more non-plasma-contacting surfaces comprise a top surface, a side surface, and a bottom surface, wherein:

the top surface comprises a first aperture passing through the ceramic article to the bottom surface, and

the side surface comprises a second aperture passing through the ceramic article,

wherein directing the first stream of solid CO 2 particles from the spray nozzle toward the plurality of surfaces of the ceramic article comprises:

directing the first stream of solid CO 2 particles toward the top surface of the ceramic article;

subsequently directing the first stream of solid CO 2 particles toward the first aperture in a first direction from the top surface to the bottom surface;

subsequently directing the first stream of solid CO 2 particles toward the side surface of the ceramic article;

subsequently directing the first stream of solid CO 2 particles toward the second aperture;

subsequently directing the first stream of solid CO 2 particles toward the bottom surface of the ceramic article; and

subsequently directing the first stream of solid CO 2 particles toward the first aperture in a second direction from the bottom surface to the top surface.

8. The method of claim 1 , wherein a pressure of the liquid CO 2 is between about 700 psi and about 900 psi.

9. The method of claim 1 , wherein a pressure of the liquid CO 2 is approximately 838 psi.

10. The method of claim 1 , wherein a distance from the spray nozzle to the ceramic article is maintained between about 0.5 inches and 2 inches.

11. The method of claim 1 , wherein the ceramic article is a chamber component selected from the group consisting of: a lid, a nozzle, a showerhead, and a liner kit.

12. The method of claim 1 , wherein the ceramic article comprises at least one of Y 3 Al 5 O 12 , Y 4 Al 2 O 9 , Y 2 O 3 , Er 2 O 3 , Gd 2 O 3 , Er 3 Al 5 O 12 , Gd 3 Al 5 O 12 , YF 3 , Nd 2 O 3 , Er 4 Al 2 O 9 , ErAlO 3 , Gd 4 Al 2 O 9 , GdAlO 3 , Nd 3 Al 5 O 12 , Nd 4 Al 2 O 9 , NdAlO 3 , or a ceramic compound comprising Y 4 Al 2 O 9 and a solid-solution of Y 2 O 3 —ZrO 2 .

13. The method of claim 1 , wherein a purity of the liquid CO 2 is at least 99.9999999%.

14. An apparatus for cleaning a ceramic article, the ceramic article comprising one or more plasma-contacting surfaces and one or more non-plasma-contacting surfaces, wherein, during use of the ceramic article, a plasma contacts the one or more plasma-contacting surfaces without contacting the one or more non-plasma-contacting surfaces, and wherein the apparatus comprises:

a mounting fixture;

a spray nozzle to generate a stream of solid CO 2 particles toward the ceramic article held by the mounting fixture; and

a controller, wherein the controller is configured to:

direct the stream of solid CO 2 particles toward the ceramic article for a first time duration to clean the ceramic article, wherein the one or more plasma-contacting surfaces are contacted by the first stream of solid CO 2 particles after the one or more non-plasma-contacting surfaces are contacted by the first stream of solid CO 2 particles to reduce particle defects on the one or more plasma-contacting surfaces, and wherein the first time duration is sufficient for the stream of solid CO 2 particles to cause a first layer of solid CO 2 to be formed on the ceramic article;

stop the stream of solid CO 2 particles for a second time duration, wherein the first layer of solid CO 2 is sublimated during the second time duration; and

after the first layer of solid CO 2 has sublimated, direct the stream of solid CO 2 particles toward the ceramic article for a third time duration to further clean the ceramic article.

15. The apparatus of claim 14 , wherein one or more of the spray nozzle or mounting fixture is arranged to cause the stream of solid CO 2 particles to contact a surface of the ceramic article at an angle ranging from 15° to 45° with respect to the surface of the ceramic article.

16. The apparatus of claim 14 , wherein at least one of the first duration or the third time duration is between about 2 minutes and about 10 minutes.

17. The apparatus of claim 14 , further comprising:

a liquid CO 2 source fluidly coupled to the spray nozzle, wherein a pressure of liquid CO 2 delivered to the spray nozzle is between about 700 psi and about 900 psi.

18. The apparatus of claim 14 , wherein the mounting fixture is configured to expose a top non-plasma-contacting surface of the ceramic article to the stream of solid CO 2 particles, expose a side non-plasma-contacting surface of the ceramic article to the stream of solid CO 2 particles after exposing the top non-plasma-contacting surface, and expose the one or more plasma-contacting surfaces of the ceramic article to the stream of solid CO 2 particles after exposing the side non-plasma-contacting surface.

19. The apparatus of claim 14 , wherein the ceramic article is a semiconductor chamber component selected from the group consisting of: a lid, a nozzle, a showerhead, and a liner kit.