Amorphous oxide and thin film transistor
The present invention relates to an amorphous oxide and a thin film transistor using the amorphous oxide. In particular, the present invention provides an amorphous oxide having an electron carrier concentration less than 10 18 /cm 3 , and a thin film transistor using such an amorphous oxide. In a thin film transistor having a source electrode 6 , a drain electrode 5 , a gate electrode 4 , a gate insulating film 3 , and a channel layer 2 , an amorphous oxide having an electron carrier concentration less than 10 18 /cm 3 is used in the channel layer 2.
1. A method of forming a field effect thin film transistor device which is used as a normally-OFF type, comprising:
providing a drain electrode;
providing a source electrode;
sputter depositing a channel layer which is contacting with the drain electrode and the source electrode, the channel layer being comprised of a transparent and amorphous indium-gallium-zinc oxide film,
wherein the sputtering deposition is performed in an oxygen-partial-pressure-controlled atmosphere at room temperature without adding impurity ions to the channel layer to increase electrical resistance, and using a polycrystalline sinter represented by InGaO 3 (ZnO) m (wherein m is a natural number less than 6) as a target material,
whereby forming the channel layer in which an atomic ratio In:Ga:Zn is 1:1:m (wherein m is a natural number less than 6) having an electron carrier concentration less than 10 16 /cm 3 determined by Hall-effect measurement and an electron mobility of 1 cm 2 /(V·sec) or more at room temperature;
providing a gate electrode; and
providing a gate insulating film positioned between the gate electrode and the channel.
2. The method of forming a field effect thin film transistor according to claim 1 , wherein the substrate is one of a glass plate, a plastic plate or a plastic film.
3. The method of forming a field effect thin film transistor according to claim 1 , further comprising a step of heating the indium-gallium-zinc oxide film in a reducing atmosphere to increase the electron carrier concentration after the film formation.
4. The method of forming a field effect thin film transistor according to claim 1 , the transistor is a switching element of LCDs or organic EL displays.