Method of manufacturing MEMS switches with reduced switching voltage
An approach includes a method of fabricating a switch. The approach includes forming a fixed electrode, forming a first cantilevered electrode, forming a second cantilevered electrode aligned vertically over the first fixed electrode, and which has an end that overlaps and is operable to directly contact an end of the first cantilevered electrode upon an application of a voltage to the fixed electrode, and forming a hermetically sealed volume encapsulating the first fixed electrode, the second fixed electrode, the first cantilevered electrode, and the second cantilevered electrode.
1. A method of fabricating a switch comprising:
forming a fixed electrode;
forming a first cantilevered electrode;
forming a second cantilevered electrode aligned vertically over the fixed electrode, and which has an end that overlaps and is operable to directly contact an end of the first cantilevered electrode upon an application of a voltage to the fixed electrode; and
forming a hermetically sealed volume encapsulating the fixed electrode, the first cantilevered electrode, and the second cantilevered electrode,
wherein the first cantilevered electrode comprises an arm with an extending protrusion which extends upward from an upper surface of the arm.
2. The method of claim 1 , wherein the hermetically sealed volume is a dome.
3. The method of claim 2 , wherein the dome is oval shaped.
4. The method of claim 1 , wherein overlapping portions of the first cantilevered electrode and the second cantilevered electrode are separated by a vertical distance of about two microns.
5. The method of claim 1 , wherein the second cantilevered electrode is formed above the first cantilevered electrode.
6. The method of claim 1 , wherein the hermetically sealed volume is formed with a nitride liner.
7. The method of claim 1 , wherein the second cantilevered electrode is operable to directly contact the end of the first cantilevered electrode upon a positive voltage applied to the fixed electrode.
8. The method of claim 7 , wherein the positive voltage is about 100 volts.
9. The method of claim 1 , wherein the arm of the first cantilevered electrode is about 50 microns long.
10. A method of fabricating a switch comprising:
forming a fixed electrode;
forming a first cantilevered electrode;
forming a second cantilevered electrode aligned vertically over the fixed electrode, and which has an end that overlaps and is operable to directly contact an end of the first cantilevered electrode upon an application of a voltage to the fixed electrode; and
forming a hermetically sealed volume encapsulating the fixed electrode, the first cantilevered electrode, and the second cantilevered electrode,
wherein the forming the hermetically sealed volume comprises:
forming at least one hole in a nitride liner to gain access to a sacrificial resist;
etching the sacrificial resist; and
closing the at least one hole by deposition of additional liner material.