Method of manufacturing wafer level package and wafer level package manufactured thereby
Provided are a wafer level package and a manufacturing method thereof. A reconfigured substrate may be formed by disposing a first semiconductor die on a dummy wafer, and forming a molding layer and a mold covering layer. A second semiconductor die may be stacked on the first semiconductor die and a photosensitive dielectric layer may be formed. Conductive vias penetrating the photosensitive dielectric layer may be plated.
1. A wafer level package comprising:
a molding layer surrounding a surface and a side of a first semiconductor die, the molding layer having a first surface and a second surface;
a mold covering layer that covers the second surface of the molding layer, the mold covering layer formed of different material from the molding layer;
a second semiconductor die attached to the first semiconductor die and to the first surface of the molding layer;
a third semiconductor die and a fourth semiconductor die stacked on the second semiconductor die forming a stepped shape;
an underfill filling a space between laterally protruded portions of the third and fourth semiconductor dies and the first surface of the molding layer, the underfill formed of different material from the molding layer;
a first photosensitive dielectric layer formed on the first surface of the molding layer to cover the second semiconductor die; and
conductive vias penetrating the first photosensitive dielectric layer and connected to portions of the first and second semiconductor dies, respectively.
2. The wafer level package of claim 1 , wherein the first semiconductor die comprises:
a first device substrate;
a first passivation layer disposed on the first device substrate; and
a first device pad penetrating the first passivation layer and exposed by the first passivation layer, the first device pad being connected to the first device substrate.
3. The wafer level package of claim 2 , wherein the second semiconductor die is disposed on the first semiconductor die, the first device pad being exposed by the second semiconductor die.
4. The wafer level package of claim 3 , wherein the second semiconductor die comprises:
a second device substrate;
a second passivation layer disposed on the second device substrate; and
a second device pad penetrating the second passivation layer and exposed by the second passivation layer, the second device pad being connected to the second device substrate,
wherein the second semiconductor die is disposed on the first semiconductor die such that the second device pad faces the same direction as a direction that the first device pad faces.
5. The wafer level package of claim 1 , wherein the second semiconductor die is substantially simultaneously attached to the first semiconductor die and the molding layer by a permanent adhesive layer.
6. The wafer level package of claim 1 , further comprises:
a second photosensitive dielectric layer disposed on the first photosensitive dielectric layer; and
redistribution layer patterns connected to the conductive vias, respectively.
7. The wafer level package of claim 1 ,
wherein the molding layer includes a resin containing fillers distributed therein, and
wherein the mold covering layer includes a dielectric material layer excluding the fillers.