Method of fabricating a semiconductor structure by asymmetric oxidation of fin material formed under gate stack
The present disclosure provides semiconductor structures and fabrication methods thereof. An exemplary fabrication method includes providing a semiconductor substrate; forming a plurality of fins on the semiconductor substrate, each fin having a first sidewall surface and an opposing second sidewall surface; performing an asymmetric oxidation process on the fins to oxidize the first sidewall surfaces of the fins to form a first oxide layer, and to oxidize the second sidewall surfaces of the fins to form a second oxide layer, a thickness of the first oxide layer being different from a thickness of the second oxide layer, and un-oxidized portions of the fins between the first oxide layer and the second oxide layer being configured as channel layers; removing the second oxide layer and a partial thickness of the first oxide layer; and forming a gate structure crossing over the channel layers over the semiconductor substrate.
1. A method for fabricating a semiconductor structure, comprising:
providing a semiconductor substrate;
forming a plurality of fins on the semiconductor substrate, each fin having a first sidewall surface and an opposing second sidewall surface;
performing an asymmetric oxidation process on the fins to oxidize the first sidewall surfaces of the fins to form a first oxide layer, and to oxidize the second sidewall surfaces of the fins to form a second oxide layer, a thickness of the first oxide layer being different from a thickness of the second oxide layer, and un-oxidized portions of the fins between the first oxide layer and the second oxide layer being configured as channel layers;
removing the second oxide layer and a partial thickness of the first oxide layer; and
forming a gate structure crossing over the channel layers over the semiconductor substrate.
2. The method according to claim 1 , wherein the asymmetric oxidation process comprises:
performing a surface modification process on the fins to cause the first sidewall surfaces of the fins and the second sidewall surfaces of the fins to have different oxidation rates; and
performing an oxidation process to form the first oxide layer on the first sidewall surfaces of the fins and the second oxide layer on the second sidewall surfaces of the fins.
3. The method according to claim 2 , wherein the surface modification process comprises:
performing an ion implantation process on sidewall surfaces of the fins.
4. The method according to claim 3 , wherein the surface modification process comprises:
performing the ion implantation process on the first sidewall surfaces of the fins with one or more of C ions, N ions, P ions, As ions, B ions, Ge ions, Si ions, Ar ions, and Xe ions.
5. The method according to claim 4 , wherein:
the ion implantation process is performed on the first sidewall surface and the opposing second sidewall surface, respectively.
6. The method according to claim 3 , wherein:
an implanting angle of the ion implantation process is in a range of approximately 2°-45°.
7. The method according to claim 3 , wherein:
a dosage of the ion implantation process is in a range of approximately 1E14 atoms/cm 2 -5E16 atom/cm 2 ; and
an energy of the ion implantation process is in a range of approximately 50 eV-20 keV.
8. The method according to claim 2 , wherein:
the oxidation process includes one of a furnace oxidation process, an in-situ steam generation oxidation process, a soak oxidation process, and a rapid thermal oxidation process.
9. The method according to claim 8 , wherein:
a temperature of the furnace oxidation process is in a range of approximately 400° C.-1100° C.
10. The method according to claim 1 , further comprising:
forming isolation structures on the semiconductor substrate between adjacent fins.
11. The method according to claim 10 , wherein:
the isolation structures cover portions of the first sidewall surface and the opposing second sidewall surface.
12. The method according to claim 1 , wherein forming a plurality of fins comprises:
providing a base substrate;
forming a mask layer defining sizes and positions of the plurality of fins to be formed on the base substrate; and
etching the base substrate using the mask layer as an etching mask.
13. The method according to claim 12 , wherein:
the mask layer and the isolation structures are made of different materials.
14. The method according to claim 1 , wherein:
a thickness of the first oxide layer is in a range of approximately 7 nm-120 nm; and
a thickness of the second oxide layer is in a range of approximately 2 nm-20 nm.
15. The method according to claim 1 , wherein:
a thickness of a remaining first oxide layer after removing the second oxide layer and the partial thickness of the first oxide layer is in a range of approximately 5 nm-100 nm.
16. The method according to claim 1 , wherein:
a thickness of the channel layers is in a range of approximately 8 nm-80 nm.
17. The method according to claim 1 , wherein:
a width of the fins is in a range of approximately 10 nm-100 nm.
18. The method according to claim 1 , wherein:
the second oxide layer and the partial thickness of the first oxide layer are removed by a wet etching process.
19. The method according to claim 1 , wherein:
the plurality of fins are made of silicon germanium.
20. The method according to claim 1 , wherein:
the first oxide layer and the second oxide layer are made of silicon germanium oxide.