IP Library › Granted Patent US 10,084,007
Granted Patent B2
US 10,084,007 · App. 15/173,326 · Granted Sep 25, 2018

Image sensor having pickup region

Inventor: Woong-Hee Lee (Gyeonggi-do, KR)
Assignee: SK Hynix Inc.
H01L27/14654H01L27/1463H01L27/14605H01L27/14636H04N5/3591
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Quick Facts
Patent No.
US 10,084,007
App. No.
15/173,326
Granted
Sep 25, 2018
Kind
B2
Abstract

The present invention provides an image sensor. An image sensor include a pixel array. The pixel array includes: a plurality of pixels; and an isolation structure suitable for insulating between the plurality of pixels. The isolation structure includes: a first conductivity-type conductive layer formed over a substrate; and a second conductivity-type pickup region formed in the first conductivity-type conductive layer and disposed between each plurality of pixels.

Claims (46)

1. An image sensor comprising:

a plurality of unit pixel groups; and

an isolation structure suitable for insulating between the plurality of unit pixel groups,

wherein the isolation structure comprises:

a first conductivity-type conductive layer formed over a substrate; and

a second conductivity-type pickup region formed in the first conductivity-type conductive layer and disposed between two adjacent unit pixel groups,

wherein the first conductivity-type conductive layer comprises either a first conductivity-type well formed in the substrate, or a first conductivity-type epitaxial layer formed over the substrate.

2. The image sensor of claim 1 , wherein the isolation structure further comprises:

an element isolation layer formed over the first conductivity-type conductive layer and having a bottom surface in contact with the second conductivity-type pickup region; and

a plug formed through the element isolation layer and connected to the second conductivity-type pickup region.

3. The image sensor of claim 1 , wherein a positive voltage variable within a voltage range from a voltage higher than a ground voltage to a voltage equal to or lower than a supply voltage is applied to the second conductivity-type pickup region.

4. The image sensor of claim 1 , wherein when the plurality of unit pixel groups operate in a global shutter mode, a positive voltage is applied to the second conductivity-type pickup region during an integration time.

5. The image sensor of claim 1 , wherein when the plurality of unit pixel groups operate in a rolling shutter mode, a positive voltage is always applied to the second conductivity-type pickup region.

6. The image sensor of claim 1 , wherein each of the plurality of unit pixel groups comprises:

a light-receiving part comprising a plurality of photoelectric conversion elements suitable for generating photocharges in response to incident light and sharing a single floating diffusion region; and

an output part suitable for outputting an image signal corresponding to the photocharges generated in the light-receiving part.

7. The image sensor of claim 6 , wherein the second conductivity-type pickup region is disposed between two adjacent light-receiving parts.

8. An image sensor comprising:

a plurality of unit pixel groups; and

an isolation structure suitable for insulating between the plurality of unit pixel groups,

wherein the isolation structure comprises:

a first conductivity-type conductive layer formed over a substrate; and

a second conductivity-type pickup region formed in the first conductivity-type conductive layer and disposed between the plurality of unit pixel groups,

wherein the second conductivity-type pickup region has a dot shape.

9. An image sensor comprising:

a plurality of unit pixel groups;

an isolation structure suitable for insulating between the plurality of unit pixel groups; and

a first pickup region of a first conductivity-type formed in the isolation structure and disposed between two adjacent unit pixel groups,

wherein the isolation structure comprises:

a first conductivity-type conductive layer; and

a second pickup region of a second conductivity-type formed in the first conductivity-type conductive layer and disposed between two adjacent unit pixel groups,

wherein the first and second pickup regions have a dot shape.

10. The image sensor of claim 9 , wherein the isolation structure further comprises:

an element isolation layer formed over the first conductivity-type conductive layer and having a bottom surface in contact with the first and second pickup regions;

a first plug formed through the element isolation layer and connected to the first pickup region; and

a second plug formed through the element isolation layer and connected to the second pickup region.

11. The image sensor of claim 9 , wherein a positive voltage variable within a voltage range from a voltage higher than a ground voltage to a voltage equal to or lower than a supply voltage is applied to the second pickup region.

12. The image sensor of claim 9 , wherein when the plurality of unit pixel groups operate in a global shutter mode, a positive voltage is applied to the second pickup region during an integration time.

13. The image sensor of claim 9 , wherein when the plurality of unit pixel groups operate in a rolling shutter mode, a positive voltage is always applied to the second pickup region.

14. The image sensor of claim 9 , wherein a ground voltage is applied to the first pickup region.

15. The image sensor of claim 9 , wherein the first conductivity-type conductive layer comprises either a first conductivity-type well formed in the substrate, or a first conductivity-type epitaxial layer formed over the substrate.

16. The image sensor of claim 9 , wherein each of the plurality of unit pixel groups comprises:

a light-receiving part comprising a plurality of photoelectric conversion elements suitable for generating photocharges in response to incident light and sharing a single floating diffusion region; and

an output part suitable for outputting an image signal corresponding to the photocharges generated in the light-receiving part.

17. The image sensor of claim 16 , wherein the first pickup region is disposed between two adjacent output parts.

18. The image sensor of claim 16 , wherein the second pickup region is disposed between two adjacent light-receiving parts.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 3, 2016
From: LEE, WOONG-HEE
To: SK HYNIX INC.
Reel/Frame 038804/0412 →
Priority Claims (1)
KR 10-2016-0003084 · Jan 11, 2016 · national
Continuity (1)
Related Publication 20170200761A1 · Jul 13, 2017
Cited By (1)
US 12,615,857