Thin film transistor with a reaction layer creating oxygen vacancies in an oxide semiconductor
A thin film transistor includes a gate electrode on a substrate, a gate insulation layer which covers the gate electrode on the substrate, an oxide semiconductor pattern which is disposed on the gate insulation layer and includes a channel portion superimposed over the gate electrode, and low resistance patterns provided at edges of the channel portion, respectively, and including oxygen vacancies, a channel passivation layer on the oxide semiconductor pattern, a reaction layer which covers the oxide semiconductor pattern and the channel passivation layer, and includes a metal oxide, and a source electrode and a drain electrode which contact the oxide semiconductor pattern.
1. A thin film transistor, comprising:
a substrate;
an oxide semiconductor pattern which is disposed on the substrate and includes:
a channel portion;
contact portions spaced apart from the channel portion; and
low resistance patterns directly disposed on the substrate, respectively located between the channel portion and the contact portions, and having oxygen vacancies greater than those of the channel portion and the contact portion;
a gate insulation layer covering the channel portion;
a gate electrode on the gate insulation layer;
a reaction layer covering the oxide semiconductor pattern and the gate electrode, the reaction layer including a metal oxide and inducing oxygen vacancies of the oxide semiconductor pattern; and
a source electrode and a drain electrode extending through the reaction layer and respectively contacting the contact portions of the oxide semiconductor pattern which include the oxygen vacancies.
2. The thin film transistor of claim 1 , wherein the reaction layer includes aluminum oxide.
3. The thin film transistor of claim 1 , wherein the low resistance patterns contact the reaction layer.
4. The thin film transistor of claim 1 , wherein the gate electrode is superimposed over the channel portion with respect to the gate insulation layer.
5. The thin film transistor of claim 4 , wherein the source electrode and the drain electrode are disposed on the reaction layer, and extend, respectively, through contact holes formed in the reaction layer.
6. The thin film transistor of claim 5 , wherein the source electrode and the drain electrode are non-overlapping with the gate electrode.
7. The thin film transistor of claim 1 , wherein the reaction layer includes oxygen atoms or oxygen ions transferred from the oxide semiconductor pattern.