Etch profile control during skip via formation
Structures for a skip via and methods of forming a skip via in an interconnect structure. A metallization level is formed that includes a dielectric layer with a top surface. An opening is formed that extends vertically from the top surface of the dielectric layer into the dielectric layer. A dielectric cap layer is deposited on a bottom surface of the opening. A fill layer is formed inside the opening and extends from the top surface of the dielectric layer to the dielectric cap layer on the bottom surface of the opening. A via opening is etched that extends vertically through the fill layer to the dielectric cap layer on the bottom surface of the opening.
1. A method comprising:
forming a first metallization level having a first dielectric layer with a top surface, a first conductive feature in the first dielectric layer, and a second conductive feature in the first dielectric layer;
forming a first opening extending vertically from the top surface of the first dielectric layer between the first conductive feature and the second conductive feature and into the first dielectric layer;
depositing a dielectric cap layer on the bottom surface of the first opening;
forming a fill layer inside the first opening that extends from the top surface of the first dielectric layer to the dielectric cap layer on the bottom surface of the first opening;
etching a via opening extending vertically through the fill layer and the dielectric cap layer on the bottom surface of the first opening; and
forming a third conductive feature in the via opening.
2. The method of claim 1 further comprising:
forming a second dielectric layer of a second metallization level on the top surface of the first dielectric layer,
wherein the via opening extends vertically in part through the second dielectric layer.
3. The method of claim 1 wherein the first conductive feature and the second conductive feature self-align the first opening when the first opening is formed such that the first conductive feature and the second conductive feature each directly border a sidewall of the first opening.
4. The method of claim 1 wherein the first opening includes one or more sidewalls that extend from the top surface of the first dielectric layer to the bottom surface, and the dielectric cap layer forms on the one or more sidewalls of the first opening.
5. The method of claim 1 wherein the first opening extends completely through the first dielectric layer.
6. The method of claim 5 wherein the first metallization level is formed on a second metallization level, and the via opening and the third conductive feature extend vertically to a fourth conductive feature in the second metallization level.
7. The method of claim 1 wherein the first opening extends partially through the first dielectric layer, and further comprising:
extending the via opening through a section of the first dielectric layer beneath the bottom surface of the first opening.
8. The method of claim 1 further comprising:
forming a second opening extending vertically from the top surface of the first dielectric layer into the first dielectric layer,
wherein the dielectric cap layer partially fills the second opening to encapsulate an air gap.
9. The method of claim 8 further comprising:
forming a fourth conductive feature and a fifth conductive feature in the first dielectric layer,
wherein the second opening extends from the top surface of the first dielectric layer into the first dielectric layer between the fourth conductive feature and the fifth conductive feature, and the air gap is located between the fourth conductive feature and the fifth conductive feature.
10. A structure comprising:
a first metallization level having a first dielectric layer with a top surface and a first opening, a first conductive feature in the first dielectric layer, and a second conductive feature in the first dielectric layer, the first opening extending vertically from the top surface of the first dielectric layer into the first dielectric layer between the first conductive feature and the second conductive feature and to a bottom surface;
a dielectric cap layer on the bottom surface of the first opening;
a fill layer inside the first opening, the fill layer extending from the top surface of the first dielectric layer to the dielectric cap layer on the bottom surface of the first opening; and
a third conductive feature in a via opening extending vertically through the fill layer and the dielectric cap layer on the bottom surface of the first opening.
11. The structure of claim 10 further comprising:
a second metallization level having a second dielectric layer on the top surface of the first dielectric layer,
wherein the via opening extends vertically in part through the second dielectric layer.
12. The structure of claim 10 wherein the first conductive feature and the second conductive feature self-align the first opening when the first opening is formed such that the first conductive feature and the second conductive feature each directly border a sidewall of the first opening.
13. The structure of claim 10 wherein the first opening includes one or more sidewalls that extend from the top surface of the first dielectric layer to the bottom surface, and the dielectric cap layer forms on the one or more sidewalls of the first opening.
14. The structure of claim 10 wherein the first opening extends completely through the first dielectric layer, the fill layer is comprised of a first dielectric material, and the dielectric cap layer is composed of a second dielectric material that etches selectively to the first dielectric material.
15. The structure of claim 14 further comprising:
a second metallization level having a fourth conductive feature,
wherein the first metallization level is formed on the second metallization level, and the via opening and the third conductive feature extend vertically to the fourth conductive feature in the second metallization level.
16. The structure of claim 10 wherein the first opening extends partially through the first dielectric layer, the fill layer is comprised of a first dielectric material, and the dielectric cap layer is composed of a second dielectric material that etches selectively to the first dielectric material.
17. The structure of claim 10 further comprising:
forming a second opening extending vertically from the top surface of the first dielectric layer into the first dielectric layer,
wherein the dielectric cap layer partially fills the second opening to encapsulate an air gap.
18. The structure of claim 17 wherein the first metallization level includes a fourth conductive feature and a fifth conductive feature in the first dielectric layer, the second opening extends from the top surface of the first dielectric layer into the first dielectric layer between the fourth conductive feature and the fifth conductive feature, and the air gap is located between the fourth conductive feature and the fifth conductive feature.