Semiconductor device and method of manufacturing the same
A semiconductor device including a direct contact and a bit line in a cell array region and a gate electrode structure in a peripheral circuit region, and a method of manufacturing the semiconductor device are provided. The semiconductor device includes a substrate including a cell array region including a first active region and a peripheral circuit region including a second active region, a first insulating layer on the substrate, the first insulating layer including contact holes exposing the first active region, a direct contact in the contact holes, wherein a direct contact is connected to the first active region, a bit line connected to the direct contact in the cell array region and extending in a first direction, and a gate insulating layer and a gate electrode structure, wherein a dummy conductive layer including substantially the same material as the direct contact is in the peripheral circuit region.
1. A semiconductor device comprising:
a substrate including a cell array region and a peripheral circuit region, the cell array region including a first active region defined by a first isolation layer, and the peripheral circuit region including a second active region defined by a second isolation layer;
a first insulating layer on the substrate, in the cell array region, the first insulating layer including contact holes exposing the first active region;
a direct contact in at least one of the contact holes in the cell array region, wherein the direct contact is connected to the first active region and is buried in the substrate;
a bit line connected to the direct contact in the cell array region and extending in a first direction; and
a gate insulating layer and a gate electrode structure on the second active region of the peripheral circuit region,
a dummy conductive layer in the peripheral circuit region, the dummy conductive layer including substantially a same material as the direct contact.
2. The semiconductor device of claim 1 , wherein the dummy conductive layer is around the gate electrode structure or forms a portion of the gate electrode structure.
3. The semiconductor device of claim 1 , wherein
the gate electrode structure includes a first gate conductive pattern on the gate insulating layer, and
the first gate conductive pattern includes a different material than the direct contact.
4. The semiconductor device of claim 3 , wherein the dummy conductive layer is around the gate electrode structure.
5. The semiconductor device of claim 3 , wherein a first conductive pattern of the bit line connected to the direct contact includes a different material than the direct contact, and the first conductive pattern of the bit line includes substantially a same material as the first gate conductive pattern.
6. The semiconductor device of claim 1 , wherein a first conductive pattern of the bit line that contacts the direct contact comprises substantially a same material as the direct contact.
7. The semiconductor device of claim 6 , wherein
the gate electrode structure includes a first gate conductive pattern on the gate insulating layer, and
the first gate conductive pattern includes a different material than the direct contact, and the dummy conductive layer is around the gate electrode structure.
8. The semiconductor device of claim 6 , wherein
the gate electrode structure includes a first gate conductive pattern on the gate insulating layer, and
the first gate conductive pattern includes the dummy conductive layer.
9. The semiconductor device of claim 1 , wherein the dummy conductive layer is configured as an etch stopping layer when an upper material layer on the dummy conductive layer is planarized.
10. The semiconductor device of claim 9 , further comprising:
a plurality of dummy conductive layers in the peripheral circuit region,
wherein the upper material layer and a lower conductive layer remain between the plurality of dummy conductive layers after planarization of the upper material layer, and the lower conductive layer or one of the dummy conductive layers form a first gate conductive pattern of the gate electrode structure.
11. The semiconductor device of claim 1 , wherein the cell array region comprises:
a word line on the substrate, the word line having a buried structure and extending in a direction different from the first direction;
a buried insulating layer on the word line;
a buried contact between bit lines and connected to the first active region;
an insulating space structure at both sidewalls of at least one of the bit lines; and
a landing pad connected to the buried contact.