Semiconductor device and power conversion device using same
In order to improve productivity of a semiconductor device, while improving stability of the blocking voltage of the semiconductor device, this semiconductor device is characterized by having a semiconductor element, and a laminated structure having three resin layers, said laminated structure being in a peripheral section surrounding a main electrode on one surface of the semiconductor element. The semiconductor device is also characterized in that the laminated structure has, on the center section side of the semiconductor element, a region where a lower resin layer is in contact with an intermediate resin layer, and a region where the lower resin layer is in contact with an upper resin layer.
1. A semiconductor device, comprising:
a semiconductor element; and
a laminated structure including a first resin layer, a second resin layer, and a third resin layer disposed in this order to cover a main electrode disposed on one side of the semiconductor element,
wherein the laminated structure includes a first area having the first resin layer in contact with the second resin layer and a second area having the first resin layer in contact with the third resin layer, both of the areas being disposed around a center of the semiconductor element,
at least part of the second area is arranged closer to the center of the semiconductor element than the first area,
the first resin layer is patterned by photolithography, and
a boundary of the at least part of the second area that is arranged closer to the center of the semiconductor element than the first area is used as a pattern for image recognition in a packaging process.
2. The semiconductor device according to claim 1 ,
wherein the area having the first resin layer in contact with the third resin layer is separated from the area having the first resin layer in contact with the second resin layer.
3. The semiconductor device according to claim 1 ,
wherein the area of the first resin layer in contact with the third resin layer accounts for 1% to 50% of the area surrounded by the third resin layer.
4. The semiconductor device according to claim 1 ,
wherein an inorganic layer of SiO 2 is disposed under the first resin layer and the third resin layer is made of a silicone gel, and
wherein both of relative dielectric constants of the first resin layer and the second resin layer are equal to or higher than a relative dielectric constant of the third resin layer and equal to or lower than the relative dielectric constant of the inorganic layer.
5. The semiconductor device according to claim 4 ,
wherein the first resin layer is made of a polyimide and the second resin layer is made of one material or more selected from the group consisting of a polyamide imide, a polyether amide imide, and a polyether amide.
6. The semiconductor device according to claim 1 ,
wherein a semiconductor base material for the semiconductor element has a wider band gap than silicon.
7. The semiconductor device according to claim 6 ,
wherein the semiconductor base material for the semiconductor element is SiC.
8. The semiconductor device according to claim 1 ,
wherein the semiconductor element is a diode.
9. The semiconductor device according to claim 8 ,
wherein a semiconductor base material for the semiconductor element has a wider band gap than silicon.
10. The semiconductor device according to claim 9 ,
wherein the semiconductor base material for the semiconductor element is SiC.
11. The semiconductor device according to claim 1 ,
wherein the semiconductor element is a metal oxide semiconductor field-effect transistor (MOSFET).
12. The semiconductor device according to claim 11 ,
wherein a semiconductor base material for the semiconductor element has a wider band gap than silicon.
13. The semiconductor device according to claim 12 ,
wherein the semiconductor base material for the semiconductor element is SiC.
14. A power converter, comprising:
a pair of direct current terminals;
at least one alternating current terminal the number of which is equal to the phase number of the alternating current;
a plurality of semiconductor switching elements each connected with one of the direct current terminals and one of the alternating current terminals; and
a plurality of diodes each connected in parallel with one of the semiconductor switching elements,
wherein the semiconductor switching elements and/or the diodes are the semiconductor devices according to claim 1 .
15. A power converter, comprising:
a pair of direct current terminals;
at least one alternating current terminal the number of which is equal to the phase number of the alternating current; and
a plurality of semiconductor switching elements each connected with one of the direct current terminals and one of the alternating current terminals,
wherein the semiconductor switching elements are the semiconductor devices according to claim 11 , and each semiconductor switching element includes a body diode.