Probe card having lead part for removing excessive solder
A probe card includes a ceramic substrate; an electrode connection part connecting an electrode pad and a via pad which are provided on one surface of the ceramic substrate; a bonding pad provided on an upper surface of the electrode pad and disposed inwardly of an edge of the electrode pad; and a probe bonded to an upper surface of the bonding pad by a solder layer between the bonding pad and the probe. The bonding pad includes a lead part protruding from a side surface of the bonding pad. As a result, overflowed solder at the time of attaching the probe onto the upper surface of the bonding pad may be dispersed to the lead part.
1. A probe card comprising:
a ceramic substrate;
an electrode connection part connecting an electrode pad and a via pad which are provided on one surface of the ceramic substrate;
a bonding pad provided on an upper surface of the electrode pad and disposed inwardly of an edge of the electrode pad;
a probe bonded to an upper surface of the bonding pad via a solder layer between the bonding pad and the probe; and
a lead part protruding, in a direction of the electrode connection part, from a side surface of the bonding pad and including a bar shape disposed on the electrode connection part, and
wherein the lead part is formed of a same material as the bonding pad, and is disposed directly on the electrode connection part.
2. The probe card of claim 1 , wherein the lead part and the bonding pad have a step therebetween.
3. The probe card of claim 1 , wherein the lead part is inclined with reference to the one surface of the ceramic substrate.
4. The probe card of claim 1 , wherein the solder layer is dispersed to the lead part when being melted.
5. The probe card of claim 1 , wherein the electrode pad is formed of at least one selected from the group consisting of silver (Ag), gold (Au), palladium (Pd), platinum (Pt), rhodium (Rh), copper (Cu), titanium (Ti), tungsten (W), molybdenum (Mo), nickel (Ni), and alloys thereof.
6. The probe card of claim 1 , wherein the bonding pad is prepared by plating a Ni or Cu seed layer with nickel.
7. The probe card of claim 1 , wherein the ceramic substrate is a low temperature co-fired ceramic (LTCC) substrate.
8. The probe card of claim 1 , wherein a width of the lead part is smaller than a width of the electrode connection part.
9. The probe card of claim 8 , wherein the width of the electrode connection part is smaller than a width of the electrode pad and a width of the via pad.
10. The probe card of claim 1 , wherein the lead part includes a portion, which is not covered by the solder layer, extending onto the electrode connection part.
11. The probe card of claim 1 , wherein the electrode connection part has a thickness the same as that of the electrode pad.
12. A probe card comprising:
a ceramic substrate;
an electrode pad and a via pad connected to each other by an electrode connection part having a width smaller than those of the via pad and the electrode pad, the electrode connection part having a thickness the same as that of the electrode pad;
a bonding pad provided on the electrode pad and disposed inwardly of the electrode pad;
a probe bonded to the bonding pad via a solder layer between the bonding pad and the probe; and
a lead part protruding from a side surface of the bonding pad and extending on the electrode connection part, the lead part having a width smaller than that of the electrode connection part,
wherein the lead part is formed of a same material as the bonding pad.
13. The probe card of claim 12 , wherein the lead part and the bonding pad have a step therebetween.
14. The probe card of claim 12 , wherein the lead part is inclined with reference to a surface of the ceramic substrate.
15. The probe card of claim 12 , wherein the solder layer is dispersed to the lead part when being melted.
16. The probe card of claim 12 , wherein the electrode pad is formed of at least one selected from the group consisting of silver (Ag), gold (Au), palladium (Pd), platinum (Pt), rhodium (Rh), copper (Cu), titanium (Ti), tungsten (W), molybdenum (Mo), nickel (Ni), and alloys thereof.
17. The probe card of claim 12 , wherein the bonding pad is prepared by plating a Ni or Cu seed layer with nickel.
18. The probe card of claim 12 , wherein the ceramic substrate is a low temperature co-fired ceramic (LTCC) substrate.
19. The probe card of claim 12 , wherein the lead part is disposed directly on the electrode connection part.
20. The probe card of claim 12 , wherein the lead part includes a portion, which is not covered by the solder layer, extending onto the electrode connection part.
21. A probe card comprising: a ceramic substrate;
a first electrically conductive layer disposed on the ceramic substrate, and including an electrode pad, a via pad, and an electrode connection part connecting the electrode pad and the via pad to each other, the electrode connection part having a width smaller than those of the via pad and the electrode pad;
a second electrically conductive layer entirely, directly disposed on the first electrically conductive layer, and including a bonding pad and a lead part made of a same material, the lead part protruding from a side surface of the bonding pad, extending onto the electrode connection part, and having a width smaller than those of the electrode connection part and the bonding pad;
a solder layer disposed on the bonding pad; and
a probe attached to the bonding pad through the solder layer.