FinFET with U-shaped channel and S/D epitaxial cladding extending under gate spacers
In one aspect, a method of forming finFET devices is provided which includes patterning fins in a wafer; forming dummy gates over the fins; forming spacers on opposite sides of the dummy gates; depositing a gap fill oxide on the wafer, filling any gaps between the spacers; removing the dummy gates forming gate trenches; trimming the fins within the gate trenches such that a width of the fins within the gate trenches is less than the width of the fins under the spacers adjacent to the gate trenches, wherein u-shaped grooves are formed in sides of the fins within the gate trenches; and forming replacement gate stacks in the gate trenches, wherein portions of the fins adjacent to the replacement gate stacks serve as source and drain regions of the finFET devices.
1. A fin field-effect transistor (FinFET) device, comprising:
fins patterned in a wafer;
a gate stack between gate spacers and over portions of the fins that serve as channel regions of the finFET device, wherein portions of the fins adjacent to the gate stack serve as source and drain regions of the finFET device, wherein a width of the fins under the gate stack is less than the width of the fins adjacent to the gate stack, and wherein u-shaped grooves are provided in sides of the fins under the gate stack; and
a doped epitaxial cladding layer on the fins in the source and drain regions of the finFET device and under the gate spacers, wherein the doped epitaxial cladding layer extends at least up to, and abuts, the gate stack.
2. The finFET device of claim 1 , wherein the doped epitaxial cladding layer comprises epitaxial silicon, germanium, or silicon germanium, and wherein the doped epitaxial cladding layer is in-situ doped with an n-type or a p-type dopant.
3. The finFET device of claim 1 , wherein the doped epitaxial cladding layer has a thickness of less than or equal to about 3 nm.
4. The finFET device of claim 1 , wherein the width of the fins adjacent to the gate stack increases from a top to a bottom of each of the fins.
5. The finFET device of claim 1 , wherein the doped epitaxial cladding layer extends under the gate stack.