Semiconductor device with oxygen rich gate insulating layer
A thin film transistor structure in which a source electrode and a drain electrode formed from a metal material are in direct contact with an oxide semiconductor film may lead to high contact resistance. One cause of high contact resistance is that a Schottky junction is formed at a contact plane between the source and drain electrodes and the oxide semiconductor film. An oxygen-deficient oxide semiconductor layer which includes crystal grains with a size of 1 nm to 10 nm and has a higher carrier concentration than the oxide semiconductor film serving as a channel formation region is provided between the oxide semiconductor film and the source and drain electrodes.
1. A semiconductor device comprising:
a gate electrode over an insulating surface;
a gate insulating layer over the gate electrode;
an oxide semiconductor layer over the gate insulating layer; and
a source region and a drain region over the oxide semiconductor layer,
wherein the source region and the drain region each comprise oxide semiconductor,
wherein the source region and the drain region each have a lower oxygen concentration than the oxide semiconductor layer,
wherein the gate insulating layer comprises a first region and a second region,
wherein the first region is located closer to the oxide semiconductor layer side than the second region, and
wherein the first region has a higher oxygen concentration than the second region.
2. The semiconductor device according to claim 1 , wherein the source region and the drain region each comprise a crystal grain with a size of 1 nm to 10 nm.
3. The semiconductor device according to claim 1 , wherein the oxide semiconductor layer comprises indium, gallium, and zinc.
4. The semiconductor device according to claim 1 , wherein the source region and the drain region each comprise indium, gallium, and zinc.
5. The semiconductor device according to claim 1 , further comprising:
a first metal layer over the source region, and
a second metal layer over the drain region.
6. The semiconductor device according to claim 5 ,
wherein the first metal layer is a source electrode layer, and
wherein the second metal layer is a drain electrode layer.
7. The semiconductor device according to claim 1 ,
wherein an oxygen concentration of the gate insulating layer is highest at an interface between the gate insulating layer and the oxide semiconductor layer, and
wherein an oxygen concentration of the oxide semiconductor layer is highest at the interface between the gate insulating layer and the oxide semiconductor layer.
8. The semiconductor device according to claim 1 , wherein each of the source region and the drain region is in contact with each of side surfaces of the oxide semiconductor layer.
9. A semiconductor device comprising:
a gate electrode over an insulating surface;
a gate insulating layer over the gate electrode;
an oxide semiconductor layer over the gate insulating layer;
a first source region and a first drain region over the oxide semiconductor layer;
a second source region over the first source region; and
a second drain region over the first drain region,
wherein the first source region and the first drain region each comprise oxide semiconductor,
wherein the first source region and the first drain region each have a lower oxygen concentration than the oxide semiconductor layer,
wherein the gate insulating layer comprises a first region and a second region,
wherein the first region is located closer to the oxide semiconductor layer side than the second region,
wherein the first region has a higher oxygen concentration than the second region, and
wherein the second source region and the second drain region each comprise the oxide semiconductor comprising W, Mo, Ti, Ni, or Al.
10. The semiconductor device according to claim 9 , wherein the first source region and the first drain region each comprise a crystal grain with a size of 1 nm to 10 nm.
11. The semiconductor device according to claim 9 , wherein the oxide semiconductor layer comprises indium, gallium, and zinc.
12. The semiconductor device according to claim 9 , wherein the first source region and the first drain region each comprise indium, gallium, and zinc.
13. The semiconductor device according to claim 9 , wherein the second source region and the second drain region each comprise indium, gallium, and zinc.
14. The semiconductor device according to claim 9 , further comprising:
a first metal layer over the second source region, and
a second metal layer over the second drain region.
15. The semiconductor device according to claim 14 ,
wherein the first metal layer is a source electrode layer, and
wherein the second metal layer is a drain electrode layer.
16. The semiconductor device according to claim 9 ,
wherein an oxygen concentration of the gate insulating layer is highest at an interface between the gate insulating layer and the oxide semiconductor layer, and
wherein an oxygen concentration of the oxide semiconductor layer is highest at the interface between the gate insulating layer and the oxide semiconductor layer.
17. The semiconductor device according to claim 9 , wherein each of the first source region and the first drain region is in contact with each of side surfaces of the oxide semiconductor layer.
18. A semiconductor device comprising:
a gate electrode over an insulating surface;
a gate insulating layer over the gate electrode;
an oxide semiconductor layer over the gate insulating layer;
a channel protective layer over a channel formation region of the oxide semiconductor layer; and
a source region and a drain region over the oxide semiconductor layer,
wherein the source region and the drain region each comprise oxide semiconductor,
wherein the source region and the drain region each have a lower oxygen concentration than the oxide semiconductor layer,
wherein the gate insulating layer comprises a first region and a second region,
wherein the first region is located closer to the oxide semiconductor layer side than the second region, and
wherein the first region has a higher oxygen concentration than the second region.
19. The semiconductor device according to claim 18 , wherein the source region and the drain region each comprise a crystal grain with a size of 1 nm to 10 nm.
20. The semiconductor device according to claim 18 , wherein the oxide semiconductor layer comprises indium, gallium, and zinc.
21. The semiconductor device according to claim 18 , wherein the source region and the drain region each comprise indium, gallium, and zinc.
22. The semiconductor device according to claim 18 , further comprising:
a first metal layer over the source region, and
a second metal layer over the drain region.
23. The semiconductor device according to claim 22 ,
wherein the first metal layer is a source electrode layer, and
wherein the second metal layer is a drain electrode layer.
24. The semiconductor device according to claim 18 ,
wherein an oxygen concentration of the gate insulating layer is highest at an interface between the gate insulating layer and the oxide semiconductor layer, and
wherein an oxygen concentration of the oxide semiconductor layer is highest at the interface between the gate insulating layer and the oxide semiconductor layer.
25. The semiconductor device according to claim 18 , wherein each of the source region and the drain region is in contact with each of side surfaces of the oxide semiconductor layer.