Electric-programmable magnetic module

1. An electric-programmable magnetic module, comprising:

a micro electro mechanical system (MEMS) chip comprising a plurality of electromagnetic coils, each of the electromagnetic coils being individually controlled; and

a bonding equipment, wherein the MEMS chip is assembled with and carried by the bonding equipment, wherein the MEMS chip further comprises a plurality of protrusions arranged in array, the protrusions are suitable for contacting a plurality of electronic devices arranged on a first substrate, and each of the electromagnetic coils is located in one of the protrusions respectively.

2. The electric-programmable magnetic module according to claim 1 , wherein a coverage of each of the protrusions is greater than or equal to a dimension of each of the electronic devices.

3. The electric-programmable magnetic module according to claim 1 , wherein a first arrangement pitch of the protrusions is P 1 and a second arrangement pitch of the electronic devices disposed on the first substrate is P 2 , where P 1 =N×P 2 , and N is an positive integer.

4. The electric-programmable magnetic module according to claim 1 , wherein the MEMS chip further comprises a plurality of ferromagnetic metal elements and each of the ferromagnetic metal elements is disposed in a space surrounded by one of the electromagnetic coils.

5. The electric-programmable magnetic module according to claim 4 , further comprising a cap dielectric layer, wherein the cap dielectric layer covers the electromagnetic coils and the ferromagnetic metal elements.

6. The electric-programmable magnetic module according to claim 1 , wherein each of the electromagnetic coils comprises a multi-layered electromagnetic coil.

7. The electric-programmable magnetic module according to claim 1 , wherein an arrangement pitch of the electromagnetic coils ranges from 1 micro-meter to 100 micro-meters.